In this paper we report on the existence, distribution, crystallographic orientation, size, and morphology of graphite crystallites within diamond films prepared by microwave plasma assisted chemical vapor deposition. Transmission electron microscopy and Raman spectroscopy techniques were used to characterize graphite formation in diamond films deposited under various conditions.

Topics
Raman spectroscopy, Thin film deposition, Transmission electron microscopy, Carbon based materials, Chemical vapor deposition, Plasma sources
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© 1989 American Vacuum Society.
1989
American Vacuum Society
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