Using the semiempirical cross‐section functions for electron impact ionization developed by Lotz, we calculated the ionization rate constants for most elements as a function of the electron temperature in a low‐pressure noble gas plasma typically employed in electron gas secondary neutral mass spectrometry (SNMS). After first‐order corrections accounting for (a) the different mean energies of sputtered neutral particles and (b) signal losses due to heavy particle scattering by discharge gas particles (e.g., Ar), the neutral‐to‐ion conversion factors α0X are calculated for the Leybold INA 3 system for most elements X across the Periodic Table. Assuming uniform (mass independent) transmission in the detection system the ratios α0Fe/α0X are equivalent with the relative sensitivity factors D0Fe/D0X in SNMS.
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July 1988
Research Article|
July 01 1988
Calculation of postionization probabilities as a function of plasma parameters in electron gas secondary neutral mass spectrometry
A. Wucher
A. Wucher
IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
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J. Vac. Sci. Technol. A 6, 2287–2292 (1988)
Article history
Received:
August 03 1987
Accepted:
February 06 1988
Citation
A. Wucher; Calculation of postionization probabilities as a function of plasma parameters in electron gas secondary neutral mass spectrometry. J. Vac. Sci. Technol. A 1 July 1988; 6 (4): 2287–2292. https://doi.org/10.1116/1.575025
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