© 1988 American Vacuum Society.
1988
American Vacuum Society
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J. J. Pouch, S. A. Alterovitz, J. A. Woollam, J. E. Oh; Summary Abstract: Surface analysis of amorphous Ta–Cu thin films deposited on GaAs. J. Vac. Sci. Technol. A 1 May 1988; 6 (3): 983–984. https://doi.org/10.1116/1.575045
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