Summary Abstract: Sputter deposition in ultrahigh vacuum systems

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Dissertation| May 01 1988

H. Fischer;

H. Fischer

Balzers AG, FL‐9496 Balzers, Liechtenstein

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G. Peter;

G. Peter

Balzers AG, FL‐9496 Balzers, Liechtenstein

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J. A. Koprio

Balzers AG, FL‐9496 Balzers, Liechtenstein

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J. Vac. Sci. Technol. A 6, 2109–2110 (1988)

https://doi.org/10.1116/1.575197

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