Summary Abstract: Effect of oxygen incorporation in AlN thin films

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Dissertation| May 01 1988

F. S. Ohuchi;

F. S. Ohuchi

Central Research and Development Department, E. I. du Pont de Nemours & Co., Inc., Wilmington, Delaware 19898

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R. H. French

Central Research and Development Department, E. I. du Pont de Nemours & Co., Inc., Wilmington, Delaware 19898

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J. Vac. Sci. Technol. A 6, 1695–1696 (1988)

https://doi.org/10.1116/1.575313

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