A new design of a hybrid molecular pump with large throughput is described in this paper. It can be operated within the pressure range of 1 to 10−10 Torr for a clean vacuum with a maximum throughput of 10 Torr l/s. The maximum inlet pressure is above 1 Torr, which is almost 100 times higher than that of a conventional turbomolecular pump (TMP). The pump is constructed with ten disks of a TMP and nine disks of a Siegbahn molecular pump in series, with a clearance of 0.5 mm between rotating and stationary parts. The compression ratio for H2 is over 700, which is equivalent to that of a TMP with 31 disks.
Skip Nav Destination
Research Article| May 01 1988
A new hybrid molecular pump with large throughput
J. G. Chu; A new hybrid molecular pump with large throughput. J. Vac. Sci. Technol. A 1 May 1988; 6 (3): 1202–1204. https://doi.org/10.1116/1.575677
Download citation file:
Don't already have an account? Register
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Could not validate captcha. Please try again.