A new design of a hybrid molecular pump with large throughput is described in this paper. It can be operated within the pressure range of 1 to 10−10 Torr for a clean vacuum with a maximum throughput of 10 Torr l/s. The maximum inlet pressure is above 1 Torr, which is almost 100 times higher than that of a conventional turbomolecular pump (TMP). The pump is constructed with ten disks of a TMP and nine disks of a Siegbahn molecular pump in series, with a clearance of 0.5 mm between rotating and stationary parts. The compression ratio for H2 is over 700, which is equivalent to that of a TMP with 31 disks.
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Research Article| May 01 1988
A new hybrid molecular pump with large throughput
J. G. Chu; A new hybrid molecular pump with large throughput. J. Vac. Sci. Technol. A 1 May 1988; 6 (3): 1202–1204. https://doi.org/10.1116/1.575677
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