The secondary electron emission induced by the electron impact on grid materials of ionization gauges has been studied. It makes up for about 10% of the sensitivity of the gauge. Changes in the chemical composition of the grid result in changes of the secondary electron yield and thus in changes of the gauge sensitivity amounting up to several percent. Gold and carbon constitute especially stable surfaces.

Topics
Surface collisions, Electron impact ionization, Transition metals, Chemical elements
This content is only available via PDF.
© 1987 American Vacuum Society.
1987
American Vacuum Society
You do not currently have access to this content.