Summary Abstract: Adsorption and reaction of oxygen on Si(100): A modulated molecular beam and time‐resolved x‐ray photoelectron spectroscopy study

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Dissertation| July 01 1987

Mark P. D’Evelyn;

Mark P. D’Evelyn

Department of Chemistry, University of Washington, Seattle, Washington 98195

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Mark M. Nelson;

Mark M. Nelson

Department of Chemistry, University of Washington, Seattle, Washington 98195

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Thomas Engel

Department of Chemistry, University of Washington, Seattle, Washington 98195

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J. Vac. Sci. Technol. A 5, 642–644 (1987)

https://doi.org/10.1116/1.574656

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