Summary Abstract: The development of two 12×4 ft vacuum valves for a laser isotope separation chamber

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Dissertation| July 01 1987

R. A. Shimkus;

R. A. Shimkus

CBI Na‐Con, Inc., Oak Brook, Illinois 60522

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G. Burnett

GNB Corporation, Hayward, California 94544

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J. Vac. Sci. Technol. A 5, 2544–2545 (1987)

https://doi.org/10.1116/1.574418

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