A new partial pressure gauge is proposed that is capable of measuring partial pressures of He and D2 gases in the mixture. The gauge consists of a conventional ion scattering spectrometer with a Wien filter. The influence of the residual gases CH4 and H2O on the pressure measurements of D2 and He in this gauge is discussed.

Topics
Wien filter, Ion scattering spectroscopy, Isotopes, Chemical elements
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© 1987 American Vacuum Society.
1987
American Vacuum Society
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