A new partial pressure gauge is proposed that is capable of measuring partial pressures of He and D2 gases in the mixture. The gauge consists of a conventional ion scattering spectrometer with a Wien filter. The influence of the residual gases CH4 and H2O on the pressure measurements of D2 and He in this gauge is discussed.
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Research Article| July 01 1987
New partial pressure gauge for helium and deuterium using the ion backscattering principle
K. Akaishi, A. Uritani, Y. Kubota, Y. Hori; New partial pressure gauge for helium and deuterium using the ion backscattering principle. J. Vac. Sci. Technol. A 1 July 1987; 5 (4): 2444–2446. https://doi.org/10.1116/1.574867
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