Summary Abstract: The use of electron and laser beams in processing microelectronic films

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Dissertation| July 01 1987

Z. Yu;

Z. Yu

Department of Electrical Engineering, Colorado State University, Fort Collins, Colorado 80523

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C. A. Moore;

C. A. Moore

Department of Electrical Engineering, Colorado State University, Fort Collins, Colorado 80523

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G. J. Collins

Department of Electrical Engineering, Colorado State University, Fort Collins, Colorado 80523

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J. Vac. Sci. Technol. A 5, 1759–1760 (1987)

https://doi.org/10.1116/1.574532

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