Summary Abstract: Preliminary experiments on a new type of metastable‐atom‐beam source

Kanaji, T.; Yamanishi, A.; Urano, T.; Fujimoto, F.

doi:10.1116/1.574758

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Dissertation| July 01 1987

Summary Abstract: Preliminary experiments on a new type of metastable‐atom‐beam source

T. Kanaji;

T. Kanaji

Department of Applied Physics, Faculty of Engineering, Kobe University, Rokko, Nada, Kobe 657, Japan

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A. Yamanishi;

A. Yamanishi

Department of Applied Physics, Faculty of Engineering, Kobe University, Rokko, Nada, Kobe 657, Japan

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T. Urano;

T. Urano

Department of Applied Physics, Faculty of Engineering, Kobe University, Rokko, Nada, Kobe 657, Japan

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F. Fujimoto

College of General Education, The University of Tokyo, Komaba, Meguro‐ku, Tokyo 153, Japan

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J. Vac. Sci. Technol. A 5, 1317–1318 (1987)

https://doi.org/10.1116/1.574758

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Summary Abstract: Preliminary experiments on a new type of metastable‐atom‐beam source

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