Summary Abstract: Observation of Auger electron channeling pattern and eliminating method of crystal orientation dependency in quantitative Auger electron spectroscopy

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Dissertation| July 01 1987

Y. Sakai;

Y. Sakai

JEOL Ltd., 1418 Nakagami, Akishima‐shi, Tokyo 196, Japan

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A. Mogami

JEOL Ltd., 1418 Nakagami, Akishima‐shi, Tokyo 196, Japan

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J. Vac. Sci. Technol. A 5, 1222–1224 (1987)

https://doi.org/10.1116/1.574646

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