The Auger spectra of the polar and prism surfaces of single‐crystal ZnO were measured. The sensitivity factors derived from the differentiated spectra are 0.26 and 0.25 for a beam energy of 3 and 5 keV, respectively. These values agree fairly well with the theoretical calculations of Mroczkowski and Lichtman.

Topics
Auger electron spectroscopy, Metal oxides, Chemical elements
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© 1987 American Vacuum Society.
1987
American Vacuum Society
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