Multispectral zinc sulfide (MS-ZnS) is an important broadband optical material used in various imaging and sensing technologies. To address the challenge of withstanding aerodynamic loads during operational use, surface hardening treatments of MS-ZnS using Ga2S3 have demonstrated effectiveness while preserving optimal optical properties. Secondary ion mass spectrometry (SIMS) is particularly well-suited for analyzing Ga incorporation in the subsurface of post-treated ZnS windows. Herein, we report the determination of the relative sensitivity factor (RSF) for Ga in a ZnS matrix to calibrate Ga concentration profiles. The RSFs of 69Ga in ZnS were obtained from multiple SIMS measurements on three 69Ga-implanted ZnS coupons at doses of 0.5 × 1015, 2.5 × 1015, and 5.1 × 1015 (at. cm−2). We found that the elemental RSF values are 1.78 × 1020 (±17%), 1.76 × 1020 (±21%), and 1.48 × 1020 (±13%) (at. cm−3), indicating a proportional relationship with the amount of Ga as deduced from standard analysis versus the ratio of 69Ga and 64Zn count rates. These RSF determinations provide a reliable tool for analytical and process optimization purposes.
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March 2025
Research Article|
January 14 2025
Secondary ion mass spectrometry relative sensitivity factor of 69Ga in ZnS
Hayat Soufiani
;
Hayat Soufiani
a)
(Conceptualization, Formal analysis, Investigation, Methodology, Validation, Writing – original draft, Writing – review & editing)
1
Materials Science Department, University of Central Florida
, Orlando, Florida 32816
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Mikhail Klimov
;
Mikhail Klimov
(Data curation, Software)
2
Materials Characterization Facility (MCF/AMPAC), University of Central Florida
, Orlando, Florida 32816
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Romain Gaume
Romain Gaume
a)
(Funding acquisition, Project administration, Resources, Supervision, Validation, Writing – review & editing)
1
Materials Science Department, University of Central Florida
, Orlando, Florida 328163
CREOL, College of Optics and Photonics, University of Central Florida
, Orlando, Florida 328164
NanoScience Technology Center, University of Central Florida
, Orlando, Florida 32816
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J. Vac. Sci. Technol. A 43, 023201 (2025)
Article history
Received:
October 21 2024
Accepted:
December 27 2024
Citation
Hayat Soufiani, Mikhail Klimov, Romain Gaume; Secondary ion mass spectrometry relative sensitivity factor of 69Ga in ZnS. J. Vac. Sci. Technol. A 1 March 2025; 43 (2): 023201. https://doi.org/10.1116/6.0004165
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