Ion beam analysis (IBA) is an established tool for material characterization, providing precise information on elemental composition, depth profiles, and structural information in the region near the surface of materials. However, traditional data processing methods can be slow and computationally intensive, limiting the efficiency and speed of the analysis. This article explores the current landscape of applying machine learning algorithms (MLAs) in the field of IBA, demonstrating the immense potential to optimize and accelerate processes. We present how ML has been employed to extract valuable insights from large datasets, automate repetitive tasks, and enhance the interpretability of results, with practical examples of applications in various IBA techniques, such as RBS, PIXE, and others. Finally, perspectives on using MLA to approach open problems in IBA are also discussed.
REFERENCES
1.
C.
Jeynes
, R. P.
Webb
, and A.
Lohstroh
, Rev. Accel. Sci. Technol.
4
, 41
(2011
). 2.
G. W.
Grime
, O. B.
Zeldin
, M. E.
Snell
, E. D.
Lowe
, J. F.
Hunt
, G. T.
Montelione
, L.
Tong
, E. H.
Snell
, and E. F.
Garman
, J. Am. Chem. Soc.
142
, 185
(2020
). 3.
H. J.
Whitlow
et al., Nucl. Instrum. Meth. B
554
, 165411
(2024
). 4.
M.
Mayer
et al., Nucl. Fusion
60
, 025001
(2019
). 5.
M.
Rubel
, P.
Petersson
, E.
Alves
, S.
Brezinsek
, J. P.
Coad
, K.
Heinola
, M.
Mayer
, and A.
Widdowson
, Nucl. Instrum. Meth. B
371
, 4
(2016
). 6.
K.
Komander
, P.
Malinovskis
, G. K.
Pálsson
, M.
Wolff
, and D.
Primetzhofer
, Int. J. Hydrogen Energy
57
, 583
(2024
). 7.
A.
Simon
, N. P.
Barradas
, C.
Jeynes
, and F.
Romolo
, Forensic. Sci. Int.
358
, 111767
(2024
). 8.
J.
Campbell
, D.
Thomson
, E.
Flannigan
, N.
Holmes
, D.
Tesselaar
, and S.
VanBommel
, Nucl. Instrum. Meth. B
447
, 22
(2019
). 9.
L. N.
Sargent
, E. L.
Flannigan
, and J. L.
Campbell
, Nucl. Instrum. Meth. B
490
, 61
(2021
). 10.
G.
Laricchiuta
, W.
Vandervorst
, I.
Vickridge
, M.
Mayer
, and J.
Meersschaut
, J. Vac. Sci. Technol. A
37
, 020601
(2019
). 11.
N.
Claessens
, P.
Couture
, J.
England
, R.
Vos
, T.
Hantschel
, W.
Vandervorst
, A.
Vantomme
, and J.
Meersschaut
, Surf. Interfaces
32
, 102101
(2022
). 12.
N.
Claessens
, A.
Delabie
, A.
Vantomme
, W.
Vandervorst
, and J.
Meersschaut
, Nucl. Instrum. Meth. B
540
, 174
(2023
). 13.
C.
Jeynes
, Nucl. Instrum. Meth. B
406
, 30
(2017
). 14.
C.
Jeynes
, N.
Peng
, N.
Barradas
, and R.
Gwilliam
, Nucl. Instrum. Meth. B
249
, 482
(2006
). 15.
C.
Jeynes
, N. P.
Barradas
, and E.
Szilágyi
, Anal. Chem.
84
, 6061
(2012
). 16.
J. L.
Colaux
and C.
Jeynes
, Anal. Methods
6
, 120
(2014
). 17.
D. J.
Cureatz
, M.
Kavčič
, M.
Petric
, K.
Isaković
, I. B.
Mihalić
, M. R.
Ramos
, S.
Fazinić
, and J. L.
Campbell
, Spectrochim. Acta B: At. Spectrosc.
194
, 106483
(2022
). 18.
C.
Jeynes
, M.
Bailey
, N.
Bright
, M.
Christopher
, G.
Grime
, B.
Jones
, V.
Palitsin
, and R.
Webb
, Nucl. Instrum. Meth. B
271
, 107
(2012
). 19.
C.
Jeynes
, V. V.
Palitsin
, M.
Kokkoris
, A.
Hamilton
, and G. W.
Grime
, Nucl. Instrum. Meth. B
465
, 85
(2020
). 20.
T.
Silva
, C.
Rodrigues
, N.
Added
, M.
Rizzutto
, M.
Tabacniks
, T.
Höschen
, U.
von Toussaint
, and M.
Mayer
, Nucl. Instrum. Meth. B
506
, 32
(2021
). 21.
T. F.
Silva
, C. L.
Rodrigues
, M. H.
Tabacniks
, U.
von Toussaint
, and M.
Mayer
, Nucl. Instrum. Meth. B
533
, 9
(2022
). 22.
M.
Mayer
, Nucl. Instrum. Meth. B
332
, 176
(2014
). 23.
N.
Barradas
and C.
Jeynes
, Nucl. Instrum. Meth. B
266
, 1875
(2008
). 24.
E.
Rauhala
, N.
Barradas
, S.
Fazinic
, M.
Mayer
, E.
Szilágyi
, and M.
Thompson
, Nucl. Instrum. Meth. B
244
, 436
(2006
). 25.
J.
Campbell
, D.
Cureatz
, E.
Flannigan
, C.
Heirwegh
, J.
Maxwell
, J.
Russell
, and S.
Taylor
, Nucl. Instrum. Meth. B
499
, 77
(2021
). 26.
R. L.
McGreevy
and L.
Pusztai
, Mol. Simul.
1
, 359
(1988
). 27.
E. O.
Pyzer-Knapp
, J. W.
Pitera
, P. W. J.
Staar
, S.
Takeda
, T.
Laino
, D. P.
Sanders
, J.
Sexton
, J. R.
Smith
, and A.
Curioni
, npj Comput. Mater.
8
, 1
(2022
). 28.
29.
IAEA
, Artificial Intelligence for Accelerating Nuclear Applications, Science and Technology
(International Atomic Energy Agency
, Vienna
, 2022
). iSBN: 9789201315229.30.
T. F.
Silva
, C. L.
Rodrigues
, M.
Mayer
, M. V.
Moro
, G. F.
Trindade
, F. R.
Aguirre
, N.
Added
, M. A.
Rizzutto
, and M. H.
Tabacniks
, Nucl. Instrum. Meth. B
371
, 86
(2016
), The 22nd International Conference on Ion Beam Analysis (IBA 2015). 31.
N. P.
Barradas
and A.
Vieira
, Phys. Rev. E
62
, 5818
(2000
). 32.
A.
Vieira
and N.
Barradas
, Nucl. Instrum. Meth. B
170
, 235
(2000
). 33.
N. P.
Barradas
, A.
Vieira
, and R.
Patrício
, Phys. Rev. E
65
, 066703
(2002
). 34.
H.
Pinho
, A.
Vieira
, N.
Nené
, and N.
Barradas
, Nucl. Instrum. Meth. B
228
, 383
(2005
). 35.
N.
Nené
, A.
Vieira
, and N.
Barradas
, Nucl. Instrum. Meth. B
246
, 471
(2006
). 36.
J.
Demeulemeester
, D.
Smeets
, N. P.
Barradas
, A.
Vieira
, C. M.
Comrie
, K.
Temst
, and A.
Vantomme
, Nucl. Instrum. Meth. B
268
, 1676
(2010
). 37.
T. F.
Silva
, G. F.
Trindade
, and M. A.
Rizzutto
, X-Ray Spectrom.
47
, 372
(2018
). 38.
V. G.
Oliveira
and T. F.
Silva
, J. Phys.: Conf. Ser.
2340
, 012003
(2022
). 39.
C.
Jeynes
and J. L.
Colaux
, Analyst
141
, 5944
(2016
). 40.
C.
Jeynes
, “Elastic backscattering of ions for compositional analysis,” in Characterization of Materials (John Wiley & Sons, Ltd, Hoboken, NJ, 2012), Chap. 1, pp. 1–21, https://onlinelibrary.wiley.com/doi/pdf/10.1002/0471266965.com092.pub241.
J.
Davies
, J.
Forster
, and S.
Walker
, Nucl. Instrum. Meth. B
136–138
, 594
(1998
). 42.
M.
Kokkoris
, “Nuclear reaction analysis (NRA) and particle-induced gamma-ray emission (PIGE),” in Characterization of Materials (John Wiley & Sons, Ltd., Hoboken, NJ, 2012), Chap. 1, pp. 1–18, https://onlinelibrary.wiley.com/doi/pdf/10.1002/0471266965.com093.pub243.
K.
Ishii
, Quantum Beam Sci.
3
, 12
(2019
). 44.
A.
Vantomme
, Nucl. Instrum. Meth. B
371
, 12
(2016
). 45.
T. F.
Silva
, C. L.
Rodrigues
, M. H.
Tabacniks
, H. D. C.
Pereira
, T. B.
Saramela
, and R. O.
Guimarães
, Nucl. Instrum. Meth. B
478
, 111
(2020
). 46.
M.
Mayer
, W.
Eckstein
, H.
Langhuth
, F.
Schiettekatte
, and U.
von Toussaint
, Nucl. Instrum. Meth. B
269
, 3006
(2011
). 47.
M.
Mayer
and T.
Silva
, Nucl. Instrum. Meth. B
406
, 75
(2017
). 48.
M.
Mayer
, K.
Arstila
, K.
Nordlund
, E.
Edelmann
, and J.
Keinonen
, Nucl. Instrum. Meth. B
249
, 823
(2006
). 49.
N. P.
Barradas
, P. K.
Marriott
, C.
Jeynes
, and R. P.
Webb
, Nucl. Instrum. Meth. B Ion Beam Anal.
136–138
, 1157
(1998
). 50.
N. P.
Barradas
, Surf. Interface Anal.
35
, 760
(2003
). 51.
N.
Barradas
, C.
Jeynes
, R.
Webb
, U.
Kreissig
, and R.
Grötzschel
, Nucl. Instrum. Meth. B
149
, 233
(1999
). 52.
M.
Mayer
, J. Phys.: Conf. Ser.
2326
, 012007
(2022
). 53.
K. J.
Robinson
and H.
Thissen
, J. Vac. Sci. Technol. A
42
, 040801
(2024
). 54.
A.
Vieira
, N. P.
Barradas
, and C.
Jeynes
, Surf. Interface Anal.
31
, 35
(2001
). 55.
R. D. S.
Guimarães
, T. F.
Silva
, C. L.
Rodrigues
, M. H.
Tabacniks
, S.
Bach
, V. V.
Burwitz
, P.
Hiret
, and M.
Mayer
, Nucl. Instrum. Meth. B
493
, 28
(2021
). 56.
D.
Solis-Lerma
and H.
Khodja
, J. Phys.: Conf. Ser.
2326
, 012006
(2022
). 57.
M.
Mayer
et al. and W7-X Team
, Phys. Scr.
T171
, 014035
(2020
). 58.
M.
Mayer
et al., Nucl. Fusion
62
, 126049
(2022
). 59.
T. G.
Dietterich
, Multiple Classifier Systems (Springer Berlin Heidelberg, Berlin, 2000), pp. 1–15.60.
G.
Magchiels
, C.
Mtshali
, L.
Kotsedi
, I.
Segola
, and A.
Vantomme
, Nucl. Instrum. Meth. B
551
, 165354
(2024
). 61.
G.
Magchiels
, N.
Claessens
, J.
Meersschaut
, and A.
Vantomme
, Sci. Rep.
14
, 8186
(2024
). 62.
K. F.
Muzakka
, S.
Möller
, S.
Kesselheim
, J.
Ebert
, A.
Bazarova
, H.
Hoffmann
, S.
Starke
, and M.
Finsterbusch
, Sci. Rep.
14
, 16983
(2024
). 63.
T.
Chen
and C.
Guestrin
, in Proceedings of the 22nd ACM SIGKDD International Conference on Knowledge Discovery and Data Mining, KDD ’16 (Association for Computing Machinery, New York, 2016), pp. 785–794.64.
D. D.
Cohen
and J.
Crawford
, Nucl. Instrum. Meth. B
546
, 165169
(2024
). 65.
C. G.
Ryan
, E.
van Achterbergh
, C. J.
Yeats
, S. L.
Drieberg
, G.
Mark
, B. M.
McInnes
, T. T.
Win
, G.
Cripps
, and G. F.
Suter
, Nucl. Instrum. Meth. B
188
, 18
(2002
). 66.
M.
Reis
, P.
Chaves
, A.
Taborda
, J.
Marques
, and N.
Barradas
, Nucl. Instrum. Meth. B
318
, 65
(2014
). 67.
K.
Ishii
, Radiat. Phys. Chem.
75
, 1135
(2006
). 68.
T.
Silva
, T.
Saramela
, C.
Rodrigues
, H.
Pereira
, E.
Sousa
, and M.
Tabacniks
, “PIXESim: A plugin to MultiSIMNRA that enables PIXE calculations” (2021), iBA&PIXE-SIMS 2021.69.
J. V.
Martins
, P.
Artaxo
, E. S. B.
Ferraz
, and M. H.
Tabacniks
, Nucl. Instrum. Meth. B
150
, 240
(1999
). 70.
S.
Bernardes
, M. H.
Tabacniks
, I. D. A. O.
Santos
, A. F.
Oliveira
, J. N.
Shie
, J. E. S.
Sarkis
, and T.
Oliveira
, Nucl. Instrum. Meth. B
318
, 178
(2014
), The 13th International Conference on Particle Induced X-ray Emission (PIXE 2013). 71.
L.
Giuntini
, Anal. Bioanal. Chem.
401
, 785
(2011
). 72.
T. F.
Silva
et al., Nucl. Instrum. Meth. B
422
, 68
(2018
). 73.
L.
Pichon
, L.
Beck
, P.
Walter
, B.
Moignard
, and T.
Guillou
, Nucl. Instrum. Meth. B
268
, 2028
(2010
), 19th International Conference on Ion Beam Analysis. 74.
L.
Pichon
, T.
Calligaro
, Q.
Lemasson
, B.
Moignard
, and C.
Pacheco
, Nucl. Instrum. Meth. B
363
, 48
(2015
), 14th International Conference on Particle Induced X-ray Emission. 75.
B.
Doyle
, P.
Provencio
, P.
Kotula
, A.
Antolak
, C.
Ryan
, J.
Campbell
, and K.
Barrett
, Nucl. Instrum. Meth. B
249
, 828
(2006
). 76.
I. B.
Mihalić
, S.
Fazinić
, M.
Barac
, A. G.
Karydas
, A.
Migliori
, D.
Doračić
, V.
Desnica
, D.
Mudronja
, and D.
Krstić
, J. Anal. At. Spectrom.
36
, 654
(2021
). 77.
A.
Tazzioli
, Q.
Lemasson
, A.
Girard
, L.
Pichon
, B.
Moignard
, and C.
Pacheco
, Nucl. Instrum. Meth. B
555
, 165469
(2024
). 78.
N.
De La Rosa
, N.
Peruzzi
, T.
Dreier
, M.
Truong
, U.
Johansson
, S.
Kalbfleisch
, I.
Gonçalves
, and M.
Bech
, Adv. Intell. Syst.
6
, 2400052
(2024
). 79.
M. A.
Rahman Laskar
and U.
Celano
, APL Mach. Learn.
1
, 041501
(2023
). 80.
U.
von Toussaint
, T.
Schwarz-Selinger
, M.
Mayer
, and S.
Gori
, Nucl. Instrum. Meth. B
268
, 2115
(2010
). 81.
K.
Schmid
and U.
von Toussaint
, Nucl. Instrum. Meth. B
281
, 64
(2012
). 82.
M.
Mayer
, Nucl. Instrum. Meth. B
371
, 90
(2016
). 83.
M.
Mayer
, P.
Malinský
, F.
Schiettekatte
, and Z.
Zolnai
, Nucl. Instrum. Meth. B
385
, 65
(2016
). 84.
N.
Claessens
, Z. Z.
Khan
, N. R.
Haghighi
, A.
Delabie
, A.
Vantomme
, W.
Vandervorst
, and J.
Meersschaut
, Sci. Rep.
12
, 17770
(2022
). 85.
J. L.
Colaux
, C.
Jeynes
, K. C.
Heasman
, and R. M.
Gwilliam
, Analyst
140
, 3251
(2015
). 86.
N.
Barradas
, C.
Jeynes
, M.
Jenkin
, and P.
Marriott
, Thin Solid Films
343–344
, 31
(1999
). 87.
C.
Pascual-Izarra
, M.
Reis
, and N.
Barradas
, Nucl. Instrum. Meth. B
249
, 780
(2006
). 88.
H.
Yang
, Z.
Wu
, K.
Zhang
, D.
Wang
, and H.
Yu
, J. Appl. Phys.
136
, 143101
(2024
). 89.
D. A.
Boiko
, R.
MacKnight
, B.
Kline
, and G.
Gomes
, Nature
624
, 570
(2023
). 90.
W. A.
Parfitt
and R. B.
Jackman
, Nucl. Instrum. Meth. B
478
, 21
(2020
). 91.
F.
Bivort Haiek
, A. M. P.
Mendez
, C. C.
Montanari
, and D. M.
Mitnik
, J. Appl. Phys.
132
, 245103
(2022
). 92.
F.
Akbari
, S.
Taghizadeh
, D.
Shvydka
, N. N.
Sperling
, and E. I.
Parsai
, Nucl. Instrum. Meth. B
538
, 8
(2023
). 93.
F.
Matias
et al., Sci. Rep.
14
, 9868
(2024
). 2025 Published under an exclusive license by the AVS.
2025
Author(s)
You do not currently have access to this content.
