Numerical simulation is an effective approach for improving the edge-defined film-fed growth (EFG) of β-Ga2O3 crystals by studying the heat transfer, melt flow, and crystallization interface shape. However, the nonaxisymmetric structure of the EFG furnace, the anisotropy of the β-Ga2O3 crystal, the infrared radiation absorption by free carriers, and the tracking of three-dimensional (3D) crystallization interface shape bring challenges in modeling and simulation. In this study, a global 3D nonaxisymmetric numerical model was established for the growth of ribbon β-Ga2O3 crystals. The anisotropic thermal conduction coupled with the thermal radiation inside the crystal was considered, and the dynamic mesh technique was developed to track the severely deformed crystallization interface. Subsequently, the numerical model was used to study the influences of thermal radiation absorption by free carriers on temperature distribution and crystallization interface shape. The results indicate that the thermal radiation absorption inside the crystal directly affects the shape of the crystallization interface and the stability of crystal growth. Strong radiation absorption leads to a concave crystallization interface, whereas the concavity of the interface shape exhibits a decreasing trend with the increase of crystal height, which is beyond expectation. All these phenomena are related to the heat transfer and temperature distribution in the EFG furnace, and the 3D numerical modeling and simulation are helpful in deeply understanding the reasons behind the phenomena and improving the β-Ga2O3 crystal growth.
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January 2025
Research Article|
January 03 2025
3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method
Special Collection:
Gallium Oxide Materials and Devices
Junlan Wang
;
Junlan Wang
(Investigation, Methodology, Writing – original draft)
School of Energy and Power Engineering, Xi’an Jiaotong University
, Xi’an, Shaanxi 710049, China
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Zaoyang Li
;
Zaoyang Li
a)
(Investigation, Supervision, Writing – review & editing)
School of Energy and Power Engineering, Xi’an Jiaotong University
, Xi’an, Shaanxi 710049, China
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Chao Qi
;
Chao Qi
(Methodology)
School of Energy and Power Engineering, Xi’an Jiaotong University
, Xi’an, Shaanxi 710049, China
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Lijun Liu
Lijun Liu
(Supervision)
School of Energy and Power Engineering, Xi’an Jiaotong University
, Xi’an, Shaanxi 710049, China
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a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. A 43, 013202 (2025)
Article history
Received:
October 24 2024
Accepted:
December 09 2024
Citation
Junlan Wang, Zaoyang Li, Chao Qi, Lijun Liu; 3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method. J. Vac. Sci. Technol. A 1 January 2025; 43 (1): 013202. https://doi.org/10.1116/6.0004170
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