The modulation of perpendicular magnetic anisotropy (PMA) in films has been the subject of considerable research interest, as it is proposed to be a key component for the design and realization of efficient magnetic switching in spintronic devices. In this study, we report the appearance of PMA in the as-deposited WNx/Co/Pt films without annealing. The strength of the PMA is quantified by means of effective magnetic anisotropy constant Keff, which is correlated with the N2 gas/Ar gas flow rate ratio . The highest Keff value, 1.347 × 106 erg/cm3, is obtained for the sample deposited with of 40%. This phenomenon can be explained in two ways. On the one hand, the results of the experiment demonstrate that appropriate nitrogen doping can facilitate the formation of an ideal nitrided state at the WNx/Co interface, while simultaneously reducing the roughness of the WNx/Co interface, which, in turn, enhances the PMA of the WNx/Co/Pt films. On the other hand, the first-principles calculations indicate that the enhancement of PMA can be attributed to the modification of orbital hybridization at the Co/Pt interface by WNx. This innovative approach has the potential to advance the development of high-performance magnetic random-access memory devices.
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December 2024
Research Article|
November 11 2024
Enhancement of perpendicular magnetic anisotropy in W/Co/Pt films by nitrogen doping in the W layer
Zeyi Zhu
;
Zeyi Zhu
(Data curation, Investigation, Methodology, Visualization, Writing – original draft)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
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Jie Zhou;
Jie Zhou
(Formal analysis)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
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Hehai Long;
Hehai Long
(Formal analysis)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
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Xiaomeng Wang;
Xiaomeng Wang
(Funding acquisition, Supervision)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
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Songtian Li;
Songtian Li
(Investigation)
2
National Institutes for Quantum Science and Technology
, 1233 Watanuki, Takasaki 370-1292, Japan
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Zhi Ma
;
Zhi Ma
(Resources)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
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Li Ma
;
Li Ma
a)
(Funding acquisition, Supervision, Writing – review & editing)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
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Fu Zheng
Fu Zheng
b)
(Conceptualization, Funding acquisition, Resources, Supervision, Writing – review & editing)
1
School of Physics, Ningxia University
, Yinchuan 750021, China
b)Author to whom correspondence should be addressed: zhengfu@nxu.edu.cn
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b)Author to whom correspondence should be addressed: zhengfu@nxu.edu.cn
a)
Electronic mail: mali2022@nxu.edu.cn
J. Vac. Sci. Technol. A 42, 063408 (2024)
Article history
Received:
September 05 2024
Accepted:
October 22 2024
Citation
Zeyi Zhu, Jie Zhou, Hehai Long, Xiaomeng Wang, Songtian Li, Zhi Ma, Li Ma, Fu Zheng; Enhancement of perpendicular magnetic anisotropy in W/Co/Pt films by nitrogen doping in the W layer. J. Vac. Sci. Technol. A 1 December 2024; 42 (6): 063408. https://doi.org/10.1116/6.0004042
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