A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and sustainability applications. These plasmas often have a complex combination of reactive and nonreactive species which may have spatial and temporal variations in density, temperature, and energy. Accurate knowledge of these parameters and their variations is critically important for understanding and advancing these applications through validated and predictive modeling and the design of relevant devices. Laser-induced fluorescence (LIF) provides both spatial and temporally resolved information about the plasma-produced radicals, ions, and metastables. However, the use of this powerful diagnostic tool requires the knowledge of optical transitions including excitation and fluorescence wavelengths which may not be available or scattered through a huge literature domain. In this paper, we collected, analyzed, and compiled the available transitions for laser-induced fluorescence for more than 160 chemical species relevant to the microelectronics industry and the sustainability applications. A list of species with overlapping LIF excitations and fluorescence wavelengths have been identified. This summary is intended to serve as a data reference for LIF transitions and should be updated in the future.
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December 2024
Research Article|
November 12 2024
Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications
V. S. Santosh K. Kondeti
;
V. S. Santosh K. Kondeti
a)
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Princeton Plasma Physics Laboratory
, Princeton, New Jerseya)Electronic mail: vkondeti@pppl.gov
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Shurik Yatom
;
Shurik Yatom
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Princeton Plasma Physics Laboratory
, Princeton, New Jersey
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Ivan Romadanov
;
Ivan Romadanov
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Princeton Plasma Physics Laboratory
, Princeton, New Jersey
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Yevgeny Raitses
;
Yevgeny Raitses
(Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Princeton Plasma Physics Laboratory
, Princeton, New Jersey
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Leonid Dorf
;
Leonid Dorf
(Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Writing – original draft, Writing – review & editing)
2
Applied Materials
, Santa Clara, California
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Andrei Khomenko
Andrei Khomenko
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Writing – original draft, Writing – review & editing)
2
Applied Materials
, Santa Clara, California
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a)Electronic mail: vkondeti@pppl.gov
J. Vac. Sci. Technol. A 42, 063005 (2024)
Article history
Received:
September 12 2024
Accepted:
October 14 2024
Citation
V. S. Santosh K. Kondeti, Shurik Yatom, Ivan Romadanov, Yevgeny Raitses, Leonid Dorf, Andrei Khomenko; Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications. J. Vac. Sci. Technol. A 1 December 2024; 42 (6): 063005. https://doi.org/10.1116/6.0004070
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