Despite its reputation for being nonquantitative, the TOF-SIMS technique is quite capable of providing quantifiable results. Static and near static SIMS measurements are never chaotic (that is subject to large changes due to small variations in the sample), and the instruments can be well controlled to provide highly reproducible results. These results can be replicated by different teams using similar instruments and even reproduced via correlation studies with data from substantially different tools. It is true that absolute concentrations cannot be calculated but must be derived via the use of standards produced by other techniques. Where accuracy (the correctness of the results) is what is needed, this is the approach that must be taken. Furthermore, the results can be nonlinear (especially when the differences in the surfaces being measured are at the atomic percent range and larger, a result of the “matrix effect”) and in these cases, enough standards must be obtained to determine the shape of the function that relates the SIMS results to actual quantities. In most cases, however, relative quantification obtained with sufficient precision (sufficiently narrow distribution of results on identical samples) is most important and key to the ability to evaluate and improve materials and processes. For relative comparisons, TOF-SIMS is usually an excellent analytical method. As with any technique as sophisticated as TOF-SIMS, attention to detail is required to obtain the reproducibility of which the technique is capable. This paper describes many of the details to which an analyst needs to attend to successfully produce repeatable and, therefore, quantifiable results via TOF-SIMS.
Skip Nav Destination
Best practices for performing quantitative TOF-SIMS analyses
Article navigation
July 2024
Research Article|
July 01 2024
Best practices for performing quantitative TOF-SIMS analyses

Alan M. Spool
;
Alan M. Spool
a)
(Conceptualization, Investigation, Methodology, Writing – original draft)
1
Western Digital Corporation
, Retired, 1938 Mirassou Pl, San Jose, California 95124a)Author to whom correspondence should be addressed: [email protected]
Search for other works by this author on:
Lorie Finney
Lorie Finney
b)
(Data curation, Investigation, Methodology, Writing – review & editing)
2
Analytical Sciences, Western Digital Corporation
, 5601 Great Oaks Pkwy, San Jose, California 95119
Search for other works by this author on:
a)Author to whom correspondence should be addressed: [email protected]
b)
Electronic mail: [email protected]
J. Vac. Sci. Technol. A 42, 043204 (2024)
Article history
Received:
April 02 2024
Accepted:
June 10 2024
Connected Content
A companion article has been published:
A valuable qualitative tool finds new applications
Citation
Alan M. Spool, Lorie Finney; Best practices for performing quantitative TOF-SIMS analyses. J. Vac. Sci. Technol. A 1 July 2024; 42 (4): 043204. https://doi.org/10.1116/6.0003660
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
356
Views
Citing articles via
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
Thorsten Lill, Mingmei Wang, et al.
Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success
Brian C. Welch, Jeanne Casetta, et al.
Surface passivation approaches for silicon, germanium, and III–V semiconductors
Roel J. Theeuwes, Wilhelmus M. M. Kessels, et al.
Related Content
A valuable qualitative tool finds new applications
Scilight (July 2024)
ToF-SIMS in battery research: Advantages, limitations, and best practices
J. Vac. Sci. Technol. A (August 2023)
Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application
J. Vac. Sci. Technol. A (July 2023)
High resolution electron energy loss spectroscopy study of Fomblin Z-tetraol thin films
J. Vac. Sci. Technol. A (March 2005)
Laser irradiation effect on the damage of lubricant films
J. Vac. Sci. Technol. B (April 2016)