A broadband absorber composed of a TiAlC/SiO2 film stack prepared by atomic layer deposition was presented, which could be uniformly coated on magnesium alloys with large curvature, achieving an average absorption as high as 99.4% within the wavelength range from 400 to 1000 nm. An Al2O3/TiO2 interlayer was deposited on magnesium alloys prior to the deposition of ultrablack films, which effectively prevented corrosion of magnesium caused by Al3+ and Cl− by-products in the TiAlC film. With the presence of this interlayer, the ultrablack film on the surface of the magnesium alloy exhibited good adhesion and abrasion resistance. Furthermore, after undergoing damp heat and thermal cycling tests, the absorptions of the ultrablack film-coated magnesium alloys remained at 99.1% and 99.0%, respectively, which indicated that the film is promising for application in precision optics under harsh environmental conditions.
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Research Article|
March 12 2024
Robust ultrablack film deposited on large-curvature magnesium alloy by atomic layer deposition
Special Collection:
Atomic Layer Deposition (ALD)
Jianfei Jin
;
Jianfei Jin
(Data curation, Formal analysis, Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
School of Materials and Chemistry, University of Shanghai for Science and Technology
, Shanghai 200093, China
2
Key Laboratory of Inorganic Coating Materials CAS, Chinese Academy of Sciences, Shanghai Institute of Ceramics
, Shanghai 201899, China
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Lin Lv
;
Lin Lv
(Data curation, Supervision, Writing – original draft, Writing – review & editing)
2
Key Laboratory of Inorganic Coating Materials CAS, Chinese Academy of Sciences, Shanghai Institute of Ceramics
, Shanghai 201899, China
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Lu Yan
;
Lu Yan
(Methodology, Project administration, Resources)
2
Key Laboratory of Inorganic Coating Materials CAS, Chinese Academy of Sciences, Shanghai Institute of Ceramics
, Shanghai 201899, China
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Ying Li
;
Ying Li
(Methodology, Project administration, Resources)
2
Key Laboratory of Inorganic Coating Materials CAS, Chinese Academy of Sciences, Shanghai Institute of Ceramics
, Shanghai 201899, China
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Yunzhen Cao
Yunzhen Cao
a)
(Conceptualization, Funding acquisition, Supervision, Validation, Writing – review & editing)
2
Key Laboratory of Inorganic Coating Materials CAS, Chinese Academy of Sciences, Shanghai Institute of Ceramics
, Shanghai 201899, China
a)Author to whom correspondence should be addressed: yzhcao@mail.sic.cn
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a)Author to whom correspondence should be addressed: yzhcao@mail.sic.cn
J. Vac. Sci. Technol. A 42, 032403 (2024)
Article history
Received:
November 15 2023
Accepted:
January 25 2024
Citation
Jianfei Jin, Lin Lv, Lu Yan, Ying Li, Yunzhen Cao; Robust ultrablack film deposited on large-curvature magnesium alloy by atomic layer deposition. J. Vac. Sci. Technol. A 1 May 2024; 42 (3): 032403. https://doi.org/10.1116/6.0003305
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