β-Ga2O3 is a new generation of semiconductor material with a wide bandgap of 4.9 eV. However, the β-Ga2O3 devices inevitably produce defects within them after irradiation, leading to changes in their thermal conductivities. At present, the effect of radiation-damage-induced defects on thermal conductivity of β-Ga2O3 has not been carried out. Herein, we have employed molecular dynamics simulations to investigate the impact of defects on the thermal transport of β-Ga2O3, and the obtained thermal conductivity of non-defect β-Ga2O3 is in good agreement with recent reports. Our findings indicate that the thermal conductivity of β-Ga2O3 at room temperature exhibits a consistent decrease with an increase in the concentration of Ga vacancies, but shows a decreasing and then increasing trend as the number of O vacancies increases. In addition, doping/alloying is found to improve the irradiation resistance of β-Ga2O3 based on reported defect formation energy calculations, so the mechanism of alloying effect on the thermal conductivity is deeply analyzed through first-principles calculations. Moreover, the lattice thermal conductivities of ordered InGaO3 and BGaO3 alloys are predicted by solving the phonon Boltzmann transport equation. The obtained results that κ(Ga2O3) = κ(BGaO3) > κ(InGaO3) are attributed to the combined effect of volume, specific heat capacity, group velocity, and phonon lifetime of the three materials. This work can help to disclose the radiation damage influence on thermal properties of β-Ga2O3 semiconductors.
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March 2024
Research Article|
January 12 2024
Thermal transport of defective β-Ga2O3 and B(In)GaO3 alloys from atomistic simulations
Special Collection:
Gallium Oxide Materials and Devices
Xiaoning Zhang
;
Xiaoning Zhang
(Formal analysis, Investigation, Methodology, Software, Writing – original draft)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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Haoyu Dong
;
Haoyu Dong
(Investigation)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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Chao Yang
;
Chao Yang
(Software)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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Xi Liang
;
Xi Liang
(Conceptualization)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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Xing Li
;
Xing Li
(Conceptualization)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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Jia-Yue Yang
;
Jia-Yue Yang
a
(Conceptualization, Funding acquisition, Project administration, Supervision, Writing – review & editing)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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Linhua Liu
Linhua Liu
a
(Funding acquisition, Project administration, Supervision)
1
School of Energy and Power Engineering, Shandong University
, Jinan 250061, China
2
Optics and Thermal Radiation Research Center, Institute of Frontier and Interdisciplinary Science, Shandong University
, Qingdao 266237, China
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J. Vac. Sci. Technol. A 42, 023101 (2024)
Article history
Received:
October 11 2023
Accepted:
December 14 2023
Citation
Xiaoning Zhang, Haoyu Dong, Chao Yang, Xi Liang, Xing Li, Jia-Yue Yang, Linhua Liu; Thermal transport of defective β-Ga2O3 and B(In)GaO3 alloys from atomistic simulations. J. Vac. Sci. Technol. A 1 March 2024; 42 (2): 023101. https://doi.org/10.1116/6.0003214
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