We successfully developed an atomic layer deposition (ALD) method for making Ag noble nanoparticles on cheap, commercial filter paper consisting of three-dimensional porous glass fibers and investigated the evolution of Ag nanostructures with some key process parameters. By tuning Ag particle sizes and controlling the cycle numbers of ALD deposited Ag films, we were able to obtain high-density isolated Ag nanoparticles with average sizes in 3–9 nm without the formation of agglomerates and continuous Ag films. We proved the presence of strong localized surface plasmon resonance peaks near a target wavelength of 632 nm. We further proved the presence of surface enhanced Raman scattering (SERS) signals on the Ag coated filter paper substrates using pyridine as the test analyte. Our results demonstrate that ALD is a very promising technique for a rational design of SERS substrates and, thus, has great potential for the fabrication of large-area, low-cost SERS substrates for future commercial applications, as compared to other existing techniques.
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March 2024
Research Article|
February 29 2024
High enhancement, low cost, large area surface enhanced Raman scattering substrates all by atomic layer deposition on porous filter paper Available to Purchase
Special Collection:
Atomic Layer Deposition (ALD)
Feng Niu
;
Feng Niu
(Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Supervision, Writing – original draft, Writing – review & editing)
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
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Yimin Hu;
Yimin Hu
(Funding acquisition, Investigation, Methodology, Resources, Supervision)
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
Search for other works by this author on:
Stephen LeKarz;
Stephen LeKarz
(Data curation)
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
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Wei Lu
Wei Lu
(Funding acquisition, Resources, Writing – review & editing)
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
Search for other works by this author on:
Feng Niu
Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Supervision, Writing – original draft, Writing – review & editing
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
Yimin Hu
Funding acquisition, Investigation, Methodology, Resources, Supervision
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
Stephen LeKarz
Data curation
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
Wei Lu
Funding acquisition, Resources, Writing – review & editing
Raytum Photonics, Inc.
, 43671 Trade Center Place Suite 104, Sterling, Virginia 20166-2121
a)Author to whom correspondence should be addressed: [email protected]
J. Vac. Sci. Technol. A 42, 022406 (2024)
Article history
Received:
December 04 2023
Accepted:
February 06 2024
Citation
Feng Niu, Yimin Hu, Stephen LeKarz, Wei Lu; High enhancement, low cost, large area surface enhanced Raman scattering substrates all by atomic layer deposition on porous filter paper. J. Vac. Sci. Technol. A 1 March 2024; 42 (2): 022406. https://doi.org/10.1116/6.0003352
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