The aim of this review paper is to summarize a decade of research focused on enhancing metalorganic vapor-phase epitaxy (MOVPE) growth rates of GaAs, driven by the imperative for most cost-effective and energy-efficient III–V compounds’ production. While MOVPE is renowned for producing high-quality devices, it has been constrained by production cost. For example, MOVPE was traditionally thought to have moderate growth rates that limit the throughput of the cost-intensive reactors. Recent research endeavors, however, have demonstrated ultrafast growth rates, exceeding 280 μm/h, with a remarkable group III precursor utilization efficiency of over 50%. It is worth noting that even with increased growth rates, the surface quality remains unaffected in terms of roughness and morphology. Nonetheless, optoelectronic properties, such as minority carrier lifetime, deteriorate for both p- and n-doped materials under constant growth conditions. This is attributed to an increase in the defect density of arsenic antisites, particularly EL2 and HM1 defects, as revealed by deep-level transient spectroscopy investigations. Some of these losses can be mitigated by optimizing growth conditions, such as elevating the temperature and reducing the V/III ratio. The latter not only restores some of the material quality but also increases the growth rate and reduces precursor consumption. Still, fully recovering the original reference lifetimes remains a challenge. Solar cell results indicate that structures with predominantly n-type absorbers are less affected by reduced minority carrier lifetimes. A remarkable 24.5% efficiency was achieved in a GaAs single-junction solar cell grown at 120 μm/h, representing less than 1 min of growth time for the absorber layers.
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March 2024
Review Article|
February 21 2024
Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy
Special Collection:
55 Years of Metalorganic Chemical Vapor Deposition (MOCVD)
Robin Lang
;
Robin Lang
a)
(Conceptualization, Data curation, Visualization, Writing – original draft)
Fraunhofer Institute for Solar Energy Systems
, Heidenhofstr. 2, Freiburg 79110, Germany
a)Author to whom correspondence should be addressed: robin.lang@ise.fraunhofer.de
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Christoph Klein
;
Christoph Klein
(Conceptualization, Data curation, Visualization, Writing – original draft)
Fraunhofer Institute for Solar Energy Systems
, Heidenhofstr. 2, Freiburg 79110, Germany
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Jens Ohlmann;
Jens Ohlmann
(Writing – review & editing)
Fraunhofer Institute for Solar Energy Systems
, Heidenhofstr. 2, Freiburg 79110, Germany
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Frank Dimroth;
Frank Dimroth
(Funding acquisition, Writing – review & editing)
Fraunhofer Institute for Solar Energy Systems
, Heidenhofstr. 2, Freiburg 79110, Germany
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David Lackner
David Lackner
(Conceptualization, Funding acquisition, Supervision, Writing – review & editing)
Fraunhofer Institute for Solar Energy Systems
, Heidenhofstr. 2, Freiburg 79110, Germany
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a)Author to whom correspondence should be addressed: robin.lang@ise.fraunhofer.de
J. Vac. Sci. Technol. A 42, 020801 (2024)
Article history
Received:
December 14 2023
Accepted:
January 25 2024
Citation
Robin Lang, Christoph Klein, Jens Ohlmann, Frank Dimroth, David Lackner; Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy. J. Vac. Sci. Technol. A 1 March 2024; 42 (2): 020801. https://doi.org/10.1116/6.0003393
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