Several acceptor dopants have been explored in β-Ga2O3 to produce semi-insulating substrates and epitaxial films. Fe and Mg make up the majority of research thus far; however, other transition metals provide potential alternatives for optimized performance. β-Ga2O3 bulk single crystals were grown by the Czochralski and vertical gradient freeze methods with a nominal dopant concentration of 0.25 at. % Mn. Ultraviolet-visible-near infrared spectroscopy and photoluminescence revealed polarization- and orientation-dependent optical absorptions (pleochroism) coupled with an orange luminescence. All samples were electrically insulating, on the order of 109–1011 ohm cm at room temperature, indicative of acceptor doping. Actual dopant concentrations of the intentionally doped transition metal and background impurities were determined via glow discharge mass spectrometry, indicating the macroscale segregation behavior. High-temperature resistivity measurements indicated an experimental acceptor level of 1.7 ± 0.2 eV. Hydrogenation of samples resulted in an increase in the orange luminescence and O–H stretching modes observable in the infrared spectrum. Density functional theory calculations were performed to determine the likely site-occupancy and acceptor level of Mn in the bandgap.
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January 2024
Research Article|
December 20 2023
Melt-grown semi-insulating Mn:β-Ga2O3 single crystals exhibiting unique visible absorptions and luminescence
Special Collection:
Gallium Oxide Materials and Devices
Benjamin L. Dutton
;
Benjamin L. Dutton
(Data curation, Formal analysis, Investigation, Writing – original draft, Writing – review & editing)
1
Institute of Materials Research, Washington State University
, Pullman, Washington 99164-27112
School of Mechanical and Materials Engineering, Washington State University
, Pullman, Washington 99164
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Joel B. Varley
;
Joel B. Varley
(Conceptualization, Formal analysis, Investigation, Software, Writing – review & editing)
3
Lawrence Livermore National Laboratory
, Livermore, California 94551-0808
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Cassandra Remple
;
Cassandra Remple
(Data curation, Investigation, Writing – review & editing)
2
School of Mechanical and Materials Engineering, Washington State University
, Pullman, Washington 991644
Department of Physics and Astronomy, Washington State University
, Pullman, Washington 99164-2814
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Jani Jesenovec
;
Jani Jesenovec
(Data curation, Investigation, Methodology, Writing – review & editing)
1
Institute of Materials Research, Washington State University
, Pullman, Washington 99164-27112
School of Mechanical and Materials Engineering, Washington State University
, Pullman, Washington 99164
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Brooke K. Downing
;
Brooke K. Downing
(Data curation, Investigation, Writing – review & editing)
1
Institute of Materials Research, Washington State University
, Pullman, Washington 99164-2711
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Jimmy-Xuan Shen;
Jimmy-Xuan Shen
(Data curation, Formal analysis, Investigation, Software, Writing – review & editing)
3
Lawrence Livermore National Laboratory
, Livermore, California 94551-0808
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Soroush Ghandiparsi;
Soroush Ghandiparsi
(Data curation, Investigation, Writing – review & editing)
3
Lawrence Livermore National Laboratory
, Livermore, California 94551-0808
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Adam T. Neal
;
Adam T. Neal
(Data curation, Investigation, Methodology, Supervision, Writing – review & editing)
5
Air Force Research Laboratory, Materials and Manufacturing Directorate
, 2450 Hobson Way, Wright-Patterson AFB, Ohio 45433
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Yunjo Kim
;
Yunjo Kim
(Data curation, Investigation, Writing – review & editing)
5
Air Force Research Laboratory, Materials and Manufacturing Directorate
, 2450 Hobson Way, Wright-Patterson AFB, Ohio 45433
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Andrew J. Green;
Andrew J. Green
(Data curation, Investigation, Writing – review & editing)
6
Air Force Research Laboratory, Sensors Directorate
, 2241 Avionics Circle, Wright-Patterson AFB, Ohio 45433
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Lars F. Voss;
Lars F. Voss
(Funding acquisition, Project administration, Resources, Supervision, Writing – review & editing)
3
Lawrence Livermore National Laboratory
, Livermore, California 94551-0808
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Matthew D. McCluskey
;
Matthew D. McCluskey
(Conceptualization, Funding acquisition, Resources, Supervision, Writing – review & editing)
2
School of Mechanical and Materials Engineering, Washington State University
, Pullman, Washington 991644
Department of Physics and Astronomy, Washington State University
, Pullman, Washington 99164-2814
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John S. McCloy
John S. McCloy
a)
(Conceptualization, Funding acquisition, Methodology, Project administration, Resources, Supervision, Writing – review & editing)
1
Institute of Materials Research, Washington State University
, Pullman, Washington 99164-27112
School of Mechanical and Materials Engineering, Washington State University
, Pullman, Washington 99164a)Author to whom correspondence should be addressed: john.mccloy@wsu.edu
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a)Author to whom correspondence should be addressed: john.mccloy@wsu.edu
J. Vac. Sci. Technol. A 42, 012801 (2024)
Article history
Received:
October 10 2023
Accepted:
November 17 2023
Citation
Benjamin L. Dutton, Joel B. Varley, Cassandra Remple, Jani Jesenovec, Brooke K. Downing, Jimmy-Xuan Shen, Soroush Ghandiparsi, Adam T. Neal, Yunjo Kim, Andrew J. Green, Lars F. Voss, Matthew D. McCluskey, John S. McCloy; Melt-grown semi-insulating Mn:β-Ga2O3 single crystals exhibiting unique visible absorptions and luminescence. J. Vac. Sci. Technol. A 1 January 2024; 42 (1): 012801. https://doi.org/10.1116/6.0003212
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