We present the results of an interlaboratory study on work function (WF) measurements by ultraviolet photoelectron spectroscopy (UPS) conducted under the auspices of the Versailles Project on Advanced Materials and Standards. Two samples, gold (Au) film deposited on a flat Si(100) and highly oriented pyrolytic graphite (HOPG), were distributed to six different laboratories. Prior to UPS measurements, the samples underwent common sample pre-cleaning procedures: wet treatment and Ar+-sputtering in a vacuum for Au, and mechanical peeling in air for HOPG. Instrumental settings are adjusted for energy-scale calibration and sample bias optimization. The average reference WF value (WFref) and its expanded uncertainty (Uref) were calculated from each dataset that participants provided. The results of the Au sample demonstrated 5.40 ± 0.13 eV after Ar+ sputtering in vacuum, while the HOPG sample showed 4.62 ± 0.16 eV after mechanical peeling-off. Even though the participants used slightly different sample bias voltages and sample cleaning methods with various instruments, the results demonstrate remarkable consistency. Their consistency among the laboratories for both samples with high and low WF values provides a basis for establishing a new international standard for UPS in the surface chemical analysis community.
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Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study
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September 2023
Research Article|
August 25 2023
Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study
Jeong Won Kim
;
Jeong Won Kim
a)
(Conceptualization, Investigation, Project administration, Supervision, Writing – original draft)
1
Korean Research Institute of Standards and Science (KRISS)
, 267 Gajeong-ro, Daejeon 34113, South Korea
2
Korean University of Science and Technology (UST)
, 217 Gajeong-ro, Daejeon 34113, South Korea
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Ansoon Kim
;
Ansoon Kim
b)
(Conceptualization, Project administration, Supervision, Writing – original draft)
1
Korean Research Institute of Standards and Science (KRISS)
, 267 Gajeong-ro, Daejeon 34113, South Korea
2
Korean University of Science and Technology (UST)
, 217 Gajeong-ro, Daejeon 34113, South Korea
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Hui Ung Hwang
;
Hui Ung Hwang
(Data curation, Investigation)
1
Korean Research Institute of Standards and Science (KRISS)
, 267 Gajeong-ro, Daejeon 34113, South Korea
2
Korean University of Science and Technology (UST)
, 217 Gajeong-ro, Daejeon 34113, South Korea
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Jun Hyung Kim;
Jun Hyung Kim
(Data curation, Investigation)
1
Korean Research Institute of Standards and Science (KRISS)
, 267 Gajeong-ro, Daejeon 34113, South Korea
2
Korean University of Science and Technology (UST)
, 217 Gajeong-ro, Daejeon 34113, South Korea
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Seungwook Choi
;
Seungwook Choi
(Data curation, Investigation)
1
Korean Research Institute of Standards and Science (KRISS)
, 267 Gajeong-ro, Daejeon 34113, South Korea
2
Korean University of Science and Technology (UST)
, 217 Gajeong-ro, Daejeon 34113, South Korea
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Norbert Koch
;
Norbert Koch
(Data curation, Investigation)
3
Institut für Physik, Humboldt-Universität zu Berlin
, Brook-Taylor-Strasse 6, Berlin 12489, Germany
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Dongguen Shin
;
Dongguen Shin
(Data curation, Investigation)
3
Institut für Physik, Humboldt-Universität zu Berlin
, Brook-Taylor-Strasse 6, Berlin 12489, Germany
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Zhijuan Zhao
;
Zhijuan Zhao
(Data curation, Investigation)
4
Institute of Chemistry, Chinese Academy of Sciences (CAS)
, 2 North 1st Street, Zhongguancun, Beijing 100190, People's Republic of China
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Fen Liu;
Fen Liu
(Data curation)
4
Institute of Chemistry, Chinese Academy of Sciences (CAS)
, 2 North 1st Street, Zhongguancun, Beijing 100190, People's Republic of China
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Minki Choi;
Minki Choi
(Data curation, Investigation)
5
SK Hynix
, 2091 Gyeongchung-daero, Icheon-si, Gyeonggi-do 17336, South Korea
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Kyu Myung Lee
;
Kyu Myung Lee
(Data curation, Investigation)
6
Department of Physics, Kyung Hee University
, 26, Kyungheedae-ro, Dongdaemun-gu, Seoul 02447, South Korea
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Yongsup Park
Yongsup Park
(Data curation, Investigation)
6
Department of Physics, Kyung Hee University
, 26, Kyungheedae-ro, Dongdaemun-gu, Seoul 02447, South Korea
7
Department of Information Display
, , Kyung Hee University, Seoul 02447, South Korea
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J. Vac. Sci. Technol. A 41, 053211 (2023)
Article history
Received:
May 25 2023
Accepted:
August 01 2023
Citation
Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park; Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study. J. Vac. Sci. Technol. A 1 September 2023; 41 (5): 053211. https://doi.org/10.1116/6.0002852
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