In this work, we present the floating field plate (FFP) that a novel structure modulates the electric field in beta gallium oxide (β-Ga2O3) power devices and integrated circuit modules. By reducing the peak electric field during reverse high-voltage operation, the FFP improves the device's performance while maintaining its forward characteristics. Compared with the traditional field plate structure, the FFP increases the power figure of merit by 34.9% with the same device parameters and reduces the dielectric material requirement by 52% as the same device blocking voltage. We also establish a relationship between different dielectric materials (SiO2, Al2O3, Si3N4, etc.) and the optimal structure size through simulation. More importantly, the FFP can be applied to β-Ga2O3 power modules and optimize the electric field distribution regionally, thereby improving the system’s robustness. This study provides a new solution for enhancing the performance of β-Ga2O3 devices and advancing β-Ga2O3 power modules.
Simulation studies of floating field plate in β-Ga2O3 power devices and modules
Zhao Han, Guangwei Xu, Xueqiang Xiang, Weibing Hao, Yuanbiao Li, Xuanze Zhou, Xiaobing Yan, Shibing Long; Simulation studies of floating field plate in β-Ga2O3 power devices and modules. J. Vac. Sci. Technol. A 1 September 2023; 41 (5): 053102. https://doi.org/10.1116/6.0002650
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