The objective of this work is to describe the current state of the rapidly evolving field of 3D piezoelectric microelectromechanical systems (piezoMEMS), and where it needs to go to fully leverage the potential performance benefits offered by atomic layer deposition (ALD). We define 3D piezoMEMS as the application of piezoelectric ALD films to 3D, high aspect-ratio, mechanically pliable structures. Since there are so few existing reports of 3D piezoMEMS, a literature review of ALD films applied to conventional microelectromechanical system (MEMS) devices is given. ALD processes for piezoelectric thin films are reviewed in the context of relevant applications such as transducers and actuators. Examples include aluminum nitride, hafnium zirconate, doped-hafnia, lead zirconate-titanate, lead hafnate, and lead hafnate-titanate. New concepts for ALD-enabled 3D piezoMEMS actuators are presented with supporting theoretical calculations that show that chip-scale mechanical work densities could be improved by ≫ 10 × compared to conventional planar piezoMEMS. 3D fabrication methods are also discussed, while the future needs of atomic layer processing are highlighted.

Topics
Acoustics, MEMS technology, Mechanical energy, Tribology, Information technology, Signal processing, Ferroelectric materials, PZT, Atomic layer deposition, Nanorobotics
1.
Broadcom
, ACPF-7A24 2.4 GHz Wi-Fi bandpass filter for coexistence with LTE bands 7, 38, 40A, and 41B. (2018), see https://docs.broadcom.com/doc/ACPF-7A24-DS103 (accessed 3/19/2023).
2.
D.
Moy
, Avago technologies’ FBAR filter technology designed into latest generation of 4G & LTE smartphones (2012).
3.
R. R.
William Mueller
, There is still room for innovation in FBAR filtering to address 5G and beyond—An interview with Broadcom in C. Malaquin (Ed.) i-micronews.com (2019).
5.
TDK extends ultrasonic ToF sensor platform for long-range up to 5m
, TDK InvenSense, see https://invensense.tdk.com/ (2020).
6.
Working principles and development of MEMS inertial sensors
, see https://www.siliconsensing.com/technology/mems-accelerometers/ (accessed 3/19/2023).
7.
U.
Pisipati
, “Piezoelectric MEMS microphones the only way to build reliable arrays for far-field voice recognition” (Vesper Technologies, Inc., Boston, MA, 2019), available at https://vespermems.com/wp-content/uploads/2019/02/White-Paper-Piezoelectric-Microphones-Only-way-to-build-highly-reliable-far-field-arrays-1.pdf.
8.
World’s first Adaptive ZeroPower Listening mic enables ‘power cord free’ smart home devices
, Electronic product design and test, IML Group PLC, see https://www.epdtonthenet.net/ (2020).
9.
See https://usound.com/about-usound/ (accessed 3/19/2023).
10.
G. L.
Smith
 et al,
J. Am. Ceram. Soc.
95
,
1777
(
2012
).
https://doi.org/10.1111/j.1551-2916.2012.05155.x
Crossref
Search ADS
 
11.
K.
Kurmendra
,
Recent Pat. Nanotechnol.
27
, 2525 (
2021
).
https://doi.org/10.2174/1872210515666211129115229
13.
J. S.
Pulskamp
 et al,
Proc. IEEE Micr. Elect.
4
, 900 (
2009
).
https://doi.org/10.1109/Memsys.2009.4805529
14.
G. R.
Fox
,
J. S.
Pulskamp
, and
R. G.
Polcawich
, U.S. Patent No. 10043565 (2016).
15.
G. R.
Fox
,
J. S.
Pulskamp
, and
R. G.
Polcawich
, Ferroelectric U.S. Patent No. 10043565 (2018).
16.
G.
Piazza
,
P. J.
Stephanou
, and
A. P.
Pisano
,
JMemS
15
, 1406 (
2006
).
https://doi.org/10.1109/Jmems.2006.886012
17.
A.
Ansari
, in
2019 IEEE Mtt-S International Wireless Symposium (IWS 2019)
, Guangzhou, China, 19–22 May 2019 (IEEE,
2019
).
https://doi.org/10.1109/IEEE-IWS.2019.8804148
Crossref
Search ADS
 
18.
K.
Oldham
 et al,
InFer
95
, 54 (
2007
).
https://doi.org/10.1080/10584580701756482
19.
J. S.
Pulskamp
 et al,
MRS Bull.
37
,
1062
(
2012
).
https://doi.org/10.1557/mrs.2012.269
Crossref
Search ADS
 
20.
Y.
Nemirovsky
,
A.
Nemirovsky
,
P.
Muralt
, and
N.
Setter
,
Sens. Actuators A: Phys.
56
,
239
(
1996
).
https://doi.org/10.1016/S0924-4247(96)01324-6
Crossref
Search ADS
 
21.
G. L.
Smith
,
R. Q.
Rudy
,
R. G.
Polcawich
, and
D. L.
Devoe
,
Sens. Actuators A: Phys.
188
,
305
(
2012
).
https://doi.org/10.1016/j.sna.2011.12.029
Crossref
Search ADS
 
22.
A.
Piot
 et al, in
2015 Dgon Inertial Sensors and Systems Symposium (ISS)
, Karlsruhe, Germany, 22–23 September 2015 (IEEE, New York,
2015
).
https://doi.org/10.1109/InertialSensors.2015.7314260
Crossref
Search ADS
 
23.
S.
Roundy
 and
S.
Trolier-McKinstry
,
MRS Bull.
43
,
206
(
2018
).
https://doi.org/10.1557/mrs.2018.33
Crossref
Search ADS
 
24.
Allied Market Research
, 3D IC Market by Type (Stacked 3D and Monolithic 3D), Component (Through-Silicon Via (TSV), Through Glass Via (TGV), and Silicon Interposer), Application (Logic, Imaging & Optoelectronics, Memory, MEMS/Sensors, LED, and Others), and End User (Consumer Electronics, Telecommunication, Automotive, Military & Aerospace, Medical Devices, Industrial, and Others): Global Opportunity Analysis and Industry Forecast, 2021–2030 (2021).
25.
i-Micronews Media
,
A Brave new MEMS World: A $18.2B Market by 2026
(
Yole Development
, Lyon-Villeurbanne, France,
2021
).
26.
Mordor Intelligence
, MEMS market—Growth, trends, COVID-19 impact, and forecast (2022–2027) (2021).
27.
A.
Keshavarzi
,
K.
Ni
,
W.
van den Hoek
,
S.
Datta
, and
A.
Raychowdhury
,
IEEE Micro
40
,
33
(
2020
).
https://doi.org/10.1109/MM.2020.3026667
Crossref
Search ADS
 
28.
S.
Khanna
 et al, in
2019 IEEE International Solid-State Circuits Conference—(ISSCC)
, San Francisco, CA, 17–21 February 2019 (IEEE, New York,
2019
).
https://doi.org/10.1109/ISSCC.2019.8662391
Crossref
Search ADS
 
29.
J.
Müller
 et al, in
2013 IEEE International Electron Devices Meeting
, Washington, DC, 9–11 December 2013 (IEEE, New York,
2013
).
https://doi.org/10.1109/IEDM.2013.6724605
Crossref
Search ADS
 
30.
T.
Mikolajick
,
U.
Schroeder
, and
S.
Slesazeck
,
IEEE Trans. Electron Devices
67
,
1434
(
2020
).
https://doi.org/10.1109/TED.2020.2976148
Crossref
Search ADS
 
31.
G. D.
Wilk
,
M.
Verghese
,
P.
Chen
, and
J. W.
Maes
,
ECS Trans.
50
, 207 (
2013
).
https://doi.org/10.1149/05004.0207ecst
32.
M.
Gutsche
 et al,
Future Fab. Int.
15
(
2003
).
33.
R. W.
Johnson
,
A.
Hultqvist
, and
S. F.
Bent
,
Mater. Today
17
,
236
(
2014
).
https://doi.org/10.1016/j.mattod.2014.04.026
Crossref
Search ADS
 
34.
H. C. M.
Knoops
,
T.
Faraz
,
K.
Arts
, and
W. M. M.
Kessels
,
J. Vac. Sci. Technol. A
37
, 030902 (
2019
).
https://doi.org/10.1116/1.5088582
35.
P. O.
Oviroh
,
R.
Akbarzadeh
,
D.
Pan
,
R. A. M.
Coetzee
, and
T.-C.
Jen
,
Sci. Technol. Adv. Mater.
20
,
465
(
2019
).
https://doi.org/10.1080/14686996.2019.1599694
Crossref
Search ADS
PubMed
 
36.
P.
Poodt
 et al,
J. Vac. Sci. Technol. A
30
, 010802 (
2011
).
https://doi.org/10.1116/1.3670745
37.
H.
Pedersen
,
S. T.
Barry
, and
J.
Sundqvist
,
J. Vac. Sci. Technol. A
39
,
051001
(
2021
).
https://doi.org/10.1116/6.0001125
Crossref
Search ADS
 
38.
T. M.
Mayer
 et al,
Appl. Phys. Lett.
82
, 2883 (
2003
).
https://doi.org/10.1063/1.1570926
39.
S. S.
Mani
 et al,
MRS Proc.
605
, 135 (
1999
).
https://doi.org/10.1557/proc-605-135
40.
C.
Nistorica
,
J.-F.
Liu
,
I.
Gory
,
G. D.
Skidmore
,
F. M.
Mantiziba
,
B. E.
Gnade
, and
J.
Kim
,
J. Vac. Sci. Technol. A
23
,
836
(
2005
).
https://doi.org/10.1116/1.1885022
Crossref
Search ADS
 
41.
T.
Scharf
,
S.
Prasad
,
M.
Dugger
,
P.
Kotula
,
R.
Goeke
, and
R.
Grubbs
,
Acta Mater.
54
,
4731
(
2006
).
https://doi.org/10.1016/j.actamat.2006.06.009
Crossref
Search ADS
 
42.
R. L.
Puurunen
,
J.
Saarilahti
, and
H.
Kattelus
,
ECS Trans.
11
,
3
(
2007
).
https://doi.org/10.1149/1.2779063
Crossref
Search ADS
 
43.
M. M.
Winterkorn
 et al, in
Solid-State Sensors, Actuators and Microsystems Workshop
, Hilton Head Island, SC, 5–9 June 2016 (Transducer Research Foundation, Inc., San Diego, CA,
2016
).
44.
G.
Smith
 et al, in
Solid-State Sensors, Actuators, and Microsystems Workshop
,
Hilton Head Island, SC
, (Transducer Research Foundation, Inc., San Diego, CA,
2010
).
45.
C. F.
Herrmann
,
F. W.
DelRio
,
S. M.
George
, and
V. M.
Bright
,
Proc. Soc. Photo-Opt. Ins.
5715
, 159 (
2005
).
https://doi.org/10.1117/12.589322
46.
H. H.
Sønsteby
,
H.
Fjellvåg
, and
O.
Nilsen
,
Adv. Mater. Interfaces
4
,
1600903
(
2017
).
https://doi.org/10.1002/admi.201600903
Crossref
Search ADS
 
47.
O.
Hahtela
,
P.
Sievilä
,
N.
Chekurov
, and
I.
Tittonen
,
JMiMi
17
, 737 (
2007
).
https://doi.org/10.1088/0960-1317/17/4/010
48.
K. R.
Udayakumar
,
M.
Denison
, and
T. S.
Moise
, Texas Instruments Inc., U.S. Patent No. 13/946,144 (2014).
49.
J. R.
Martin
, U.S. Patent No. 7,939,932 B2 (2011).
50.
F.
Nehm
 et al,
ACS Appl. Mater. Interfaces
7
,
22121
(
2015
).
https://doi.org/10.1021/acsami.5b06891
Crossref
Search ADS
PubMed
 
51.
C.-M.
Chen
, U.S Patent No. 17/279054 (2021).
52.
S. R.
Summerfelt
,
T. S.
Moise
, and
G. B.
Basim
, U.S. Patent No. 13/303,541 (2012).
53.
R. J.
Aggarwal
,
S. R.
Summerfelt
,
G. B.
Basim
, and
T. S.
Moise
, U.S. Patent No. 12/890,219 (2012).
54.
M.
Fraga
 and
R.
Pessoa
,
Micromachines
11
, 799 (
2020
).
https://doi.org/10.3390/mi11090799
55.
N. D.
Hoivik
,
J. W.
Elam
,
R. J.
Linderman
,
V. M.
Bright
,
S. M.
George
, and
Y. C.
Lee
,
Sens. Actuators A: Phys.
103
,
100
(
2003
).
https://doi.org/10.1016/S0924-4247(02)00319-9
Crossref
Search ADS
 
56.
F. W.
DelRio
 et al, in
2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)
, Fort Worth, TX, 6–11 June 2004 (IEEE, New York,
2004
).
57.
R. L.
Puurunen
 et al,
Sens. Actuators A: Phys.
188
, 240 (
2012
).
https://doi.org/10.1016/j.sna.2012.01.040
58.
K. J.
Dorsey
 et al,
Adv. Mater.
31
, 1901944 (
2019
).
https://doi.org/10.1002/adma.201901944
59.
D.
Dudley
,
W.
Duncan
, and
J.
Slaughter
, in Emerging Digital Micromirror Device (DMD) Applications, SPIE2023, San Jose, CA, 2003 (SPIE, Bellingham, WA,
2003
).
60.
S.
Waheed
 et al,
Lap Chip
16
, 1993 (
2016
).
https://doi.org/10.1039/C6LC00284F
61.
M.
Petruzzella
 et al,
Opt. Express
26
,
3882
(
2018
).
https://doi.org/10.1364/OE.26.003882
Crossref
Search ADS
PubMed
 
62.
E.
Cianci
 et al,
Sens. Actuators A: Phys.
282
,
124
(
2018
).
https://doi.org/10.1016/j.sna.2018.09.028
Crossref
Search ADS
 
63.
J. R.
Bickford
,
H. H.
Sonsteby
,
N. A.
Strnad
,
P. Y.
Zavalij
,
R. C.
Hoffman
,
J. Vac. Sci. Technol. A
37
,
020904
(
2019
).
https://doi.org/10.1116/1.5063925
Crossref
Search ADS
 
64.
L.
Strambini
 et al,
Nano Energy
68
,
104281
(
2020
).
https://doi.org/10.1016/j.nanoen.2019.104281
Crossref
Search ADS
 
65.
J.
Liu
,
H.
Zhu
, and
M. H. A.
Shiraz
,
Front. Energy Res.
6
, 10 (
2018
).
https://doi.org/10.3389/fenrg.2018.00010
66.
B.
Hanrahan
,
C.
Mart
,
T.
Kampfe
,
M.
Czernohorsky
,
W.
Weinreich
, and
Smith
,
A.
,
Energy Technol.
7
,
1980371
(
2019
).
https://doi.org/10.1002/ente.201980371
Crossref
Search ADS
 
67.
C.
Mart
 et al, in
International Electronic Devices Meeting
, San Francisco, CA, 12–18 December 2020 (IEEE, New York,
2020
).
68.
N. H.
Lee
 et al,
Electron. Mater. Lett.
13
, 318 (
2017
).
https://doi.org/10.1007/s13391-017-6289-0
69.
T.
Kurose
,
R.
Shirai
,
N.
Vasiljevic
, and
M.
Hayase
,
J. Phys.: Conf. Ser.
1407
,
012008
(
2019
).
https://doi.org/10.1088/1742-6596/1407/1/012008
Crossref
Search ADS
 
70.
H. T.
Le
 et al,
Microsyst. Nanoeng.
7
, 59 (
2021
).
https://doi.org/10.1038/s41378-021-00275-w
71.
Y.
Lee
 and
S. M.
George
,
ACS Nano
9
, 2061 (
2015
).
https://doi.org/10.1021/nn507277f
72.
C. M.
Huard
 et al,
J. Vac. Sci. Technol. A
35
,
031306
(
2017
).
https://doi.org/10.1116/1.4979661
Crossref
Search ADS
 
73.
T.
Faraz
 et al,
J. Appl. Phys.
128
, 213301 (
2020
).
https://doi.org/10.1063/5.0028033
74.
T.
Faraz
,
F.
Roozeboom
,
H. C. M.
Knoops
, and
W. M. M.
Kessels
,
ECS J. Solid State Sci. Technol.
4
,
N5023
(
2015
).
https://doi.org/10.1149/2.0051506jss
Crossref
Search ADS
 
75.
A.
Fischer
,
A.
Routzahn
,
S. M.
George
, and
T.
Lill
,
J. Vac. Sci. Technol., A
39
,
030801
(
2021
).
https://doi.org/10.1116/6.0000894
Crossref
Search ADS
 
76.
G. N.
Parsons
, in
Proceedings of SPIE 11326, Advances in Patterning Materials and Processes XXXVII
, San Jose, CA, 24 March 2020 (SPIE, Bellingham, WA,
2020
), p.
113260Q
.
77.
W. H.
Kim
 et al,
ACS Nano
10
, 4451 (
2016
).
https://doi.org/10.1021/acsnano.6b00094
78.
M. F. J.
Vos
 et al,
Chem. Mater.
31
, 3878 (
2019
).
https://doi.org/10.1021/acs.chemmater.9b00193
79.
A.
Thakre
 et al,
Sensors
19
,
2170
(
2019
).
https://doi.org/10.3390/s19092170
Crossref
Search ADS
PubMed
 
80.
S.
Gong
,
R.
Lu
,
Y.
Yang
,
L.
Gao
, and
A. E.
Hassanien
,
IEEE J. Microwaves
1
,
601
(
2021
).
https://doi.org/10.1109/JMW.2021.3064825
Crossref
Search ADS
 
81.
G. G.
Fattinger
, in
2008 IEEE International Frequency Control Symposium
, Honolulu, HI, 19–21 May 2008 (IEEE, New York,
2008
).
82.
M. A.
Dubois
,
P.
Muralt
, and
V.
Plessky
,
Ultrasonics
2
, 907 (
1999
).
https://doi.org/10.1109/ULTSYM.1999.849136
83.
R.
Ruby
, “
A decade of Fbar success and what is needed for another successful decade
,” in
2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA)
, Shenzhen, Guangdong Province, China, 9–11 December 2011 (IEEE, New York,
2011
).
84.
T.
Riekkinen
,
A.
Nurmela
,
J.
Molarius
,
T.
Pensala
,
P.
Kostamo
,
M.
Ylilammi
, and
S.
van Dijken
,
Thin Solid Films
517
,
6588
(
2009
).
https://doi.org/10.1016/j.tsf.2009.04.060
Crossref
Search ADS
 
85.
G.
Piazza
,
V.
Felmetsger
,
P.
Muralt
,
R. H.
Olsson
III, and
R.
Ruby
,
MRS Bull.
37
,
1051
(
2012
).
https://doi.org/10.1557/mrs.2012.268
Crossref
Search ADS
 
86.
T.
Abu Ali
,
J.
Pilz
,
P.
Schäffner
,
M.
Kratzer
,
C.
Teichert
,
B.
Stadlober
, and
A. M.
Coclite
,
Phys. Status Solidi A
217
,
2000319
(
2020
).
https://doi.org/10.1002/pssa.202000319
Crossref
Search ADS
 
87.
J. A.
Christman
,
R. R.
Woolcott
, Jr.,
A. I.
Kingon
, and
R. J.
Nemanich
,
Appl. Phys. Lett.
73
,
3851
(
1998
).
https://doi.org/10.1063/1.122914
Crossref
Search ADS
 
88.
M.
Ramezani
,
M.
Ghatge
,
R.
Tabrizian
, in
2018 IEEE Micro Electro Mechanical Systems (MEMS)
, Belfast, UK, 21–25 January 2018 (IEEE, New York,
2018
).
89.
M.
Ghatge
,
G.
Walters
,
T.
Nishida
,
R.
Tabrizian
, in
IEEE International Electron Devices Meeting (IEDM)
, San Francisco, CA, 1–5 December 2018 (IEEE, New York,
2018
).
90.
M.
Ghatge
,
G.
Walters
,
T.
Nishida
, and
R.
Tabrizian
,
IEEE Electron Device Lett.
40
,
800
(
2019
).
https://doi.org/10.1109/LED.2019.2907089
Crossref
Search ADS
 
91.
R.
Tabrizian
 and
S.
Bhunia
,
IEEES
58
, 32 (
2021
).
https://doi.org/10.1109/mspec.2021.9444937
92.
F.
Hakim
,
T.
Tharpe
, and
R.
Tabrizian
,
IEEE Microwave Wireless Components Lett.
31
,
701
(
2021
).
https://doi.org/10.1109/LMWC.2021.3067509
Crossref
Search ADS
 
93.
R. Q.
Rudy
,
G. L.
Smith
,
D. L.
DeVoe
, and
R. G.
Polcawich
,
JMemS
24
, 108 (
2014
).
https://doi.org/10.1109/JMEMS.2014.2317778
94.
C.-B.
Eom
 and
S.
Trolier-McKinstry
,
MRS Bull.
37
, 1007 (
2012
).
https://doi.org/10.1557/mrs.2012.273
95.
P.
Muralt
,
J. Am. Ceram. Soc.
91
,
1385
(
2008
).
https://doi.org/10.1111/j.1551-2916.2008.02421.x
Crossref
Search ADS
 
96.
I.
Kanno
,
Jpn. J. Appl. Phys.
57
,
040101
(
2018
).
https://doi.org/10.7567/JJAP.57.040101
Crossref
Search ADS
 
97.
J. S.
Pulskamp
 and
R. G.
Polcawich
, Three dimensional piezoelectric MEMS, U.S. Patent Number 8966993B2 (2012).
98.
R. G.
Polcawich
 and
J. S.
Pulskamp
, “
Additive processes for piezoelectric materials: Piezoelectric MEMS
,” in
MEMS Materials and Processes Handbook
(Springer, New York,
2011
).
Google Scholar
Crossref
Search ADS
 
99.
J. W.
Elam
,
D.
Routkevitch
,
P. P.
Mardilovich
, and
S. M.
George
,
Chem. Mater.
15
, 3507 (
2003
).
https://doi.org/10.1021/cm0303080
100.
M. J.
Sinclair
, “
ITHERM 2000
,” in
The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.00CH37069)
, Las Vegas, NV, 23–26 May 2000 (IEEE, New York,
2000
).
101.
L.
Ni
,
R. M.
Pocratsky
, and
M. P.
de Boer
,
Microsyst Nanoeng
7
, 6 (
2021
).
https://doi.org/10.1038/s41378-020-00232-z
102.
R. Q.
Rudy
 et al, in
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
, Shanghai, China, 24–28 January 2016 (IEEE, New York,
2016
).
103.
A. R.
Mazzoni
,
R.
Knight
, and
J.
Ryan Pulskamp
, “
Investigation of thermoelastic damping in microelectromechanical system (MEMS) quadruple-mass gyroscope (QMG) designs
,” in
A.R.L. U.S. Army Combat Capabilities Development Command (Ed.)
(United States Department of Defense, Washington, DC,
2021
).
Google Scholar
 
104.
G. W.
Hwang
,
H. J.
Lee
,
K.
Lee
, and
C. S.
Hwang
,
J. Electrochem. Soc.
154
, G69 (
2007
).
https://doi.org/10.1149/1.2431317
105.
T.
Watanabe
,
S.
Hoffman-Eifert
,
C. S.
Hwang
, and
R.
Waser
,
J. Electrochem. Soc.
155
, D715 (
2008
).
https://doi.org/10.1149/1.2977717
106.
N. A.
Strnad
 et al,
J. Am. Ceram. Soc.
104
, 1216 (
2020
).
https://doi.org/10.1111/jace.17521
107.
S.
Acharya
 et al,
J. Mater. Chem. C
4
,
1945
(
2016
).
https://doi.org/10.1039/C5TC03561A
Crossref
Search ADS
 
108.
E. L.
Lin
 et al,
J. Appl. Phys.
126
, 064101 (
2019
).
https://doi.org/10.1063/1.5087571
109.
H. H.
Sonsteby
,
O.
Nilsen
, and
H.
Fjellvag
,
Glob. Chall.
3
, 1800114 (
2019
).
https://doi.org/10.1002/gch2.201800114
110.
D. S.
Fu
,
H.
Suzuki
,
T.
Ogawa
, and
K.
Ishikawa
,
Appl. Phys. Lett.
80
, 3572 (
2002
).
https://doi.org/10.1063/1.1477619
111.
H. H.
Sonsteby
,
V. A.-L. K.
Killi
,
L. M.
Rykkje
,
J. R.
Bickford
,
E. G.
Martin
,
R. C.
Hoffman
, and
O.
Nilsen
,
Dalton Trans.
51
,
927
(
2022
).
https://doi.org/10.1039/D1DT03960A
Crossref
Search ADS
PubMed
 
112.
F.
Martin
,
P.
Muralt
,
M.-A.
Dubois
, and
A.
Pezous
,
J. Vac. Sci. Technol. A
22
, 361 (
2004
).
https://doi.org/10.1116/1.1649343
113.
M.-A.
Dubois
 and
P.
Muralt
,
Sens. Actuators A: Phys.
77
,
106
(
1999
).
https://doi.org/10.1016/S0924-4247(99)00070-9
Crossref
Search ADS
 
114.
V. A.
Tarala
,
A. S.
Altakhov
,
M. G.
Ambartsumov
, and
V. Y.
Martens
,
TePhL
43
, 74 (
2017
).
https://doi.org/10.1134/S1063785017010138
115.
T.
Nguyen
,
N.
Adjeroud
,
S.
Glinsek
,
Y.
Fleming
,
J.
Guillot
,
P.
Grysan
, and
J.
Polesel-Maris
,
APL Mater.
8
,
071101
(
2020
).
https://doi.org/10.1063/5.0011331
Crossref
Search ADS
 
116.
E.
Osterlund
,
H.
Seppanen
,
K.
Bespalova
,
V.
Miikkulainen
, and
M.
Paulasto-Kröckel
,
J. Vac. Sci. Technol. A
39
,
032403
(
2021
).
https://doi.org/10.1116/6.0000724
Crossref
Search ADS
 
117.
N. A.
Strnad
 et al,
J. Vac. Sci. Technol. A
40
,
042403
(
2022
).
https://doi.org/10.1116/6.0001633
Crossref
Search ADS
 
118.
K.
Aoki
,
Y.
Fukuda
,
K.
Numata
, and
A.
Nishimura
,
Jpn. J. Appl. Phys.
34
, 192 (
1995
).
https://doi.org/10.1143/Jjap.34.192
119.
G. B.
Rayner
,
N.
O'Toole
,
J.
Shallenberger
, and
B.
Johs
,
J. Vac. Sci. Technol. A
38
,
062408
(
2020
).
https://doi.org/10.1116/6.0000454
Crossref
Search ADS
 
120.
M. K. S.
Barr
 et al, in
ECS Meeting Abstracts MA2021-02(29)
, Digital, 10–14 October 2021 (ECS, Philadelphia, PA,
2021
).
121.
S. H.
Baek
 et al,
Science
334
, 958 (
2011
).
https://doi.org/10.1126/science.1207186
122.
S. H.
Baek
,
M. S.
Rzchowski
, and
V. A.
Aksyuk
,
MRS Bull.
37
, 1022 (
2012
).
https://doi.org/10.1557/mrs.2012.266
123.
A.
Kholkin
,
C.
Tantigate
, and
A.
Safari
,
InFer
22
, 515 (
1998
).
https://doi.org/10.1080/10584589808208070
124.
P.
Muralt
 and
J.
Baborowski
,
J. Electroceram.
12
,
101
(
2004
).
https://doi.org/10.1023/B:JECR.0000034004.99355.8b
Crossref
Search ADS
 
125.
D.
Kaden
,
S.
Gu-Stoppel
, and
H.
Quenzer
, in
Nanotech Conference & Expo 2012
, Santa Clara, CA, 18–21 June 2012 (CRC Press, Boca Raton, FL,
2012
).
126.
S.
Kirbach
,
K.
Kühnel
, and
W.
Weinreich
, in
2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)
, Cork, Ireland, 23–26 July 2018 (IEEE, New York,
2018
).
127.
S.
Fichtner
 et al,
J. Appl. Phys.
122
,
035301
(
2017
).
https://doi.org/10.1063/1.4993908
Crossref
Search ADS
 
128.
M.
Akiyama
,
T.
Kamohara
,
K.
Kano
,
A.
Teshigahara
,
Y.
Takeuchi
, and
N.
Kawahara
,
Adv. Mater.
21
,
593
(
2009
).
https://doi.org/10.1002/adma.200802611
Crossref
Search ADS
PubMed
 
129.
T.
Yoshimura
 et al,
Jpn. J. Appl. Phys.
49
, 021501 (
2010
).
https://doi.org/10.1143/JJAP.49.021501
130.
M.
Laurenti
,
M.
Castellino
,
D.
Perrone
,
A.
Asvarov
,
G.
Canavese
, and
A.
Chiolerio
,
Sci. Rep.
7
, 41957 (
2017
).
https://doi.org/10.1038/srep41957
131.
Y. C.
Yang
 et al,
Appl. Phys. Lett.
92
, 012907 (
2008
).
https://doi.org/10.1063/1.2830663
132.
M.
Sayer
 et al,
MRS Proc.
243
, 39 (
2011
).
https://doi.org/10.1557/proc-243-39
133.
M.
Sayer
 et al,
MRS Proc.
310
, 37 (
2011
).
https://doi.org/10.1557/proc-310-37
134.
I.
Kanno
,
S.
Fujii
,
T.
Kamada
, and
R.
Takayama
,
Appl. Phys. Lett.
70
,
1378
(
1997
).
https://doi.org/10.1063/1.118583
Crossref
Search ADS
 
135.
J. F.
Shepard
,
F.
Chu
,
I.
Kanno
, and
S.
Trolier-McKinstry
,
J. Appl. Phys.
85
,
6711
(
1999
).
https://doi.org/10.1063/1.370183
Crossref
Search ADS
 
136.
P.
Muralt
 et al,
J. Appl. Phys.
83
,
3835
(
1998
).
https://doi.org/10.1063/1.366614
Crossref
Search ADS
 
137.
J. F.
Shepard
,
P. J.
Moses
, and
S.
Trolier-McKinstry
,
Sens. Actuators A: Phys.
71
,
133
(
1998
).
https://doi.org/10.1016/S0924-4247(98)00161-7
Crossref
Search ADS
 
138.
N.
Ledermann
 et al,
Sens. Actuators A: Phys.
105
,
162
(
2003
).
https://doi.org/10.1016/S0924-4247(03)00090-6
Crossref
Search ADS
 
139.
S.
Trolier-McKinstry
 and
P.
Muralt
,
J. Electroceram.
12
,
7
(
2004
).
https://doi.org/10.1023/B:JECR.0000033998.72845.51
Crossref
Search ADS
 
140.
J.
Ouyang
,
R.
Ramesh
, and
A. L.
Roytburd
,
Appl. Phys. Lett.
86
, 152901 (
2005
).
https://doi.org/10.1063/1.1899252
141.
P.
Muralt
 et al,
IEEE Trans. Ultrasonics, Ferroelectr., Frequency Control
52
,
2276
(
2005
).
https://doi.org/10.1109/TUFFC.2005.1563270
Crossref
Search ADS
 
142.
F.
Tyholdt
 et al,
J. Electroceram.
19
, 311 (
2007
).
https://doi.org/10.1007/s10832-007-9037-2
143.
F.
Calame
 and
P.
Muralt
,
Appl. Phys. Lett.
90
,
062907
(
2007
).
https://doi.org/10.1063/1.2472529
Crossref
Search ADS
 
144.
K.
Prume
,
P.
Muralt
,
T.
Schmitz-Kempen
, and
S.
Tiedke
,
Proc. SPIE
6526
, 65260G (
2007
).
https://doi.org/10.1117/12.714960
145.
J.
Abergel
 et al, in
IEEE Int Ultra Sym
, Dresden, Germany, 7–10 October 2012 (IEEE, New York,
2012
).
146.
A.
Mazzalai
 et al, in
2014 Joint IEEE International Symposium on the Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM)
, State College, PA, 12–16 May 2014 (IEEE, New York,
2014
).
147.
Y.
Tsujiura
,
S.
Kawabe
,
F.
Kurokawa
,
H.
Hida
, and
I.
Kanno
,
Jpn. J. Appl. Phys.
54
,
10NA04
(
2015
).
https://doi.org/10.7567/JJAP.54.10NA04
Crossref
Search ADS
 
148.
K. R.
Udayakumar
,
P. J.
Schuele
,
J.
Chen
,
S. B.
Krupanidhi
, and
L. E.
Cross
,
J. Appl. Phys.
77
,
3981
(
1995
).
https://doi.org/10.1063/1.359508
Crossref
Search ADS
 
149.
G.
Vélu
 and
D.
Rèmiens
,
J. Eur. Ceram. Soc.
19
,
2005
(
1999
).
https://doi.org/10.1016/S0955-2219(99)00008-4
Crossref
Search ADS
 
150.
P.
Muralt
,
InFer
17
, 297 (
2006
).
https://doi.org/10.1080/10584589708013004
151.
M.-A.
Dubois
,
P.
Muralt
,
D. V.
Taylor
, and
S.
Hiboux
,
InFer
22
, 535 (
2006
).
https://doi.org/10.1080/10584589808208072
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