We determined the surface structure of cleaved CaF2(111) via atomic force microscopy and low-energy atom scattering spectroscopy for surface analyses of insulators. A pulsed 3 keV-20Ne0 impinged on the sample. The backscattered particles were detected at a scattering angle of 180°. It was found that (1) fluorine atoms dominated the topmost surfaces of cleaved CaF2(111) and (2) the topmost layer of fluorine atoms was located at an inward shift of 0.2 Å with respect to the bulk lattice structure.

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