The applications of multicomponent coatings (such as doped ternary or quaternary coatings) with superior functional properties have been shown to efficiently and sustainably improve the life span of engineering materials. This study reports the synergistic effect of negative substrate bias voltages Us and reactive gas QN2 ratio on the properties of phosphorous (P) microalloyed Ti1−xAl0.8xP0.2xN multicomponent coatings deposited using high power impulse magnetron sputtering. It is found that an increase of Us enhances the densification of the deposited coatings, with mixed cubic (c)-TiN and cubic (c)-AlN phases, as identified from the XRD pattern analysis. Furthermore, Raman spectroscopy showed that the incorporation of Al and P into the TiN structure increases the gap region between the acoustic and optic bands. An optimized mechanical property of the coatings, with a maximum hardness of 28.6 GPa was measured at Us = − 40 V and QN2 = 7 SCCM, and improved adhesion of coatings with H/E > 0.081, was possible. Improved corrosion resistance was also measured for microalloyed TiAlPN coatings. The microalloying of P with TiAlN has, thus, been shown to affect both the anodic and cathodic reactions and inhibit the corrosion of AISI 5206 steel.
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January 2023
Research Article|
December 09 2022
Effect of bias voltage and nitrogen content on the morphological, structural, mechanical, and corrosion resistance properties of micro-alloyed Ti1−xAl0.8xP0.2XNy films deposited by high power impulse magnetron sputtering
Olayinka O. Abegunde;
Olayinka O. Abegunde
a)
(Conceptualization, Formal analysis, Investigation, Methodology, Software, Visualization, Writing – original draft, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
a)Author to whom correspondence should be addressed: abegunde.oluwatosin@um6p.ma
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Mohammed Makha;
Mohammed Makha
(Conceptualization, Funding acquisition, Investigation, Methodology, Project administration, Resources, Supervision, Validation, Visualization, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
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Hicham Larhlimi;
Hicham Larhlimi
(Conceptualization, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Resources, Supervision, Validation, Visualization, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
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Mohamed Lahouij;
Mohamed Lahouij
(Conceptualization, Formal analysis, Investigation, Methodology, Validation, Visualization, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
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Youssef Samih;
Youssef Samih
(Formal analysis, Investigation, Methodology, Validation, Visualization, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
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Heinz Busch;
Heinz Busch
(Conceptualization, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Resources, Supervision, Validation, Visualization, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
2
NTTF Coatings GmbH
, Maarweg 30, 53619 Rheinbreitbach, Germany
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Jones Alami
Jones Alami
(Conceptualization, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Resources, Software, Supervision, Validation, Visualization, Writing – review & editing)
1
Department of Materials Science, Energy and Nano-engineering, Mohammed VI Polytechnic University (UM6P)
, Benguerir 43150, The Kingdom of Morocco
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a)Author to whom correspondence should be addressed: abegunde.oluwatosin@um6p.ma
J. Vac. Sci. Technol. A 41, 013101 (2023)
Article history
Received:
September 17 2022
Accepted:
November 09 2022
Citation
Olayinka O. Abegunde, Mohammed Makha, Hicham Larhlimi, Mohamed Lahouij, Youssef Samih, Heinz Busch, Jones Alami; Effect of bias voltage and nitrogen content on the morphological, structural, mechanical, and corrosion resistance properties of micro-alloyed Ti1−xAl0.8xP0.2XNy films deposited by high power impulse magnetron sputtering. J. Vac. Sci. Technol. A 1 January 2023; 41 (1): 013101. https://doi.org/10.1116/6.0002232
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