Cobalt and cobalt carbide films were successfully fabricated via a simple pulsed chemical vapor deposition (PCVD) technique. The PCVD process employs bis(1,4-di-tert-butyl-1,3-diazadienyl) cobalt as a cobalt precursor. The effect of the reducing agent, H2 gas or H2 plasma, on the chemical composition of the resulting films has been carefully investigated. In the presence of H2 gas, polycrystalline hexagonal close-packed Co was obtained through the thermal decomposition of the Co precursor. When H2 plasma was used as a coreactant, the cobalt carbide was successfully deposited instead. The crystal structure of the deposited film is orthorhombic Co2C. X-ray photoelectron spectroscopy and Raman spectroscopy results show that all the carbon contained in the films were in form of Co–C. The dependence of deposition temperature on cobalt and cobalt carbide characteristics has also been investigated.
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March 2022
Research Article|
January 10 2022
Pulsed chemical vapor deposition of cobalt and cobalt carbide thin films
Sen Chen;
Sen Chen
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication
, Beijing 102600, China
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Xiangyu Zhang;
Xiangyu Zhang
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication
, Beijing 102600, China
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Bowen Liu;
Bowen Liu
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication
, Beijing 102600, China
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Zhongwei Liu
Zhongwei Liu
a)
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication
, Beijing 102600, China
a)Author to whom correspondence should be addressed: liuzhongwei@bigc.edu.cn
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a)Author to whom correspondence should be addressed: liuzhongwei@bigc.edu.cn
J. Vac. Sci. Technol. A 40, 023401 (2022)
Article history
Received:
October 23 2021
Accepted:
December 15 2021
Citation
Sen Chen, Xiangyu Zhang, Bowen Liu, Zhongwei Liu; Pulsed chemical vapor deposition of cobalt and cobalt carbide thin films. J. Vac. Sci. Technol. A 1 March 2022; 40 (2): 023401. https://doi.org/10.1116/6.0001578
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