Summary Abstract: Improvement of ion scattering spectroscopy as an analytical technique for imaging and depth profiling

Staib, P.; Simondet, F.; Horreard, F.; Profizi, J. L.

doi:10.1116/1.573994

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Dissertation| May 01 1986

Summary Abstract: Improvement of ion scattering spectroscopy as an analytical technique for imaging and depth profiling

P. Staib;

P. Staib

Isa Riber 133, 137, Bd National, BP 231, 92503 Rueil Malmaison, France

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F. Simondet;

F. Simondet

Isa Riber 133, 137, Bd National, BP 231, 92503 Rueil Malmaison, France

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F. Horreard;

F. Horreard

Isa Riber 133, 137, Bd National, BP 231, 92503 Rueil Malmaison, France

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J. L. Profizi

Isa Riber 133, 137, Bd National, BP 231, 92503 Rueil Malmaison, France

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J. Vac. Sci. Technol. A 4, 1684–1685 (1986)

https://doi.org/10.1116/1.573994

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Summary Abstract: Improvement of ion scattering spectroscopy as an analytical technique for imaging and depth profiling

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