A systematic investigation of the pressure changes in low pressure microwave discharges of C2H2, C2H4, and C2H6, respectively, with Ar as a carrier gas, is presented as a function of plasma power and admixture of nitrogen. The results are discussed in terms of the generation of clusters of active species in the plasma volume. Properties of plasma polymerized layers from these monomers with and without the admixture of nitrogen are investigated with respect to their anticorrosion behavior as well as their wear resistance.

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