Large scale microwave plasma polymerization: A study on hydrogenated carbon films

A systematic investigation of the pressure changes in low pressure microwave discharges of C₂H₂, C₂H₄, and C₂H₆, respectively, with Ar as a carrier gas, is presented as a function of plasma power and admixture of nitrogen. The results are discussed in terms of the generation of clusters of active species in the plasma volume. Properties of plasma polymerized layers from these monomers with and without the admixture of nitrogen are investigated with respect to their anticorrosion behavior as well as their wear resistance.