The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. The ion straggle shows excellent agreement between simulation and experimental results.
REFERENCES
1.
J. F.
Gibbons
, Proc. IEEE
56
, 295
(1968
). 2.
3.
J. S.
Williams
, Mater. Sci. Eng. A
253
, 8
(1998
). 4.
M. S.
Janson
, M. K.
Linnarsson
, A.
Hallén
, and B. G.
Svensson
, J. Appl. Phys.
93
, 8903
(2003
). 5.
R.
Okuyama
, A.
Masada
, T.
Kadono
, R.
Hirose
, Y.
Koga
, H.
Okuda
, and K.
Kurita
, Jpn. J. Appl. Phys.
56
, 025601
(2017
). 6.
J.
Wang
, X.
Zhang
, F.
Fang
, and R.
Chen
, Int. J. Mach. Tools Manuf.
137
, 58
(2019
). 7.
M.
Liu
, C.Y.
Li
, L.
Liu
, Y.
Ye
, D.
Dastan
, and H.
Garmestani
, Mater. Sci. Technol.
36
, 284
(2020
). 8.
S. J.
Pearton
, Mater. Sci. Rep.
4
, 313
(1990
). 9.
P. K.
Chu
, S.
Qin
, C.
Chan
, N. W.
Cheung
, and L. A.
Larson
, Mater. Sci. Eng. R
17
, 207
(1996
). 10.
E. C.
Jones
and E.
Ishida
, Mater. Sci. Eng. R
24
, 1
(1998
). 11.
C. M.
Polley
et al., ACS Nano
7
, 5499
(2013
). 12.
S. B.
Felch
, Z.
Fang
, B.-W.
Koo
, R. B.
Liebert
, S. R.
Walther
, and D.
Hacker
, Surf. Coat. Technol.
156
, 229
(2002
). 13.
S. R.
Messenger
, E. A.
Burke
, M. A.
Xapsos
, G. P.
Summers
, and R. J.
Walters
, IEEE Trans. Nucl. Sci.
51
, 2846
(2004
). 14.
P.
Harvey-Collard
et al., Nat. Commun.
8
, 1029
(2017
). 15.
Y.
He
, S. K.
Gorman
, D.
Keith
, L.
Kranz
, J. G.
Keizer
, and M. Y.
Simmons
, Nature
571
, 371
(2019
). 16.
J. C.
Lee
, A. P.
Magyar
, D. O.
Bracher
, I.
Aharonovich
, and E. L.
Hu
, Diam. Relat. Mater.
33
, 45
(2013
). 17.
R.
Kalish
, Nucl. Instrum. Methods Phys. Res. B
272
, 42
(2012
). 18.
H.
Sumikura
, K.
Hirama
, K.
Nishiguchi
, A.
Shinya
, and M.
Notomi
, APL Mater.
8
, 031113
(2020
). 19.
T.
Schenkel
et al., Microelectron. Eng.
83
, 1814
(2006
). 20.
M.
Singh
et al., Appl. Phys. Lett.
108
, 062101
(2016
). 21.
J. L.
Pacheco
et al., Rev. Sci. Instrum.
88
, 123301
(2017
). 22.
M.
Rudolph
, B.
Sarabi
, R.
Murray
, M. S.
Carroll
, and N. M.
Zimmerman
, Sci. Rep.
9
, 7656
(2019
). 23.
D.
Holmes
, W. I. L.
Lawrie
, B. C.
Johnson
, A.
Asadpoordarvish
, J. C.
McCallum
, D. R.
McCamey
, and D. N.
Jamieson
, Phys. Rev. Mater.
3
, 083403
(2019
). 24.
A. M.
Jakob
et al., “Deterministic single ion implantation with 99.87% confidence for scalable donor-qubit arrays in silicon” (2020).25.
M.
Aramesh
, J.
Cervenka
, A.
Roberts
, A.
Djalalian-Assl
, R.
Rajasekharan
, J.
Fang
, K.
Ostrikov
, and S.
Prawer
, Opt. Express
22
, 15530
(2014
). 26.
J.
Riedrich-Möller
, S.
Pezzagna
, J.
Meijer
, C.
Pauly
, F.
Mücklich
, M.
Markham
, A. M.
Edmonds
, and C.
Becher
, Appl. Phys. Lett.
106
, 221103
(2015
). 27.
M.
Gaio
, M.
Moffa
, M.
Castro-Lopez
, D.
Pisignano
, A.
Camposeo
, and R.
Sapienza
, ACS Nano
10
, 6125
(2016
). 28.
M.
Schukraft
, J.
Zheng
, T.
Schröder
, S. L.
Mouradian
, M.
Walsh
, M. E.
Trusheim
, H.
Bakhru
, and D. R.
Englund
, APL Photon.
1
, 020801
(2016
). 29.
R. E.
Evans
, A.
Sipahigil
, D. D.
Sukachev
, A. S.
Zibrov
, and M. D.
Lukin
, Phys. Rev. Appl.
5
, 044010
(2016
). 30.
P.
Tonndorf
et al., Nano Lett.
17
, 5446
(2017
). 31.
T.
Schröder
et al., Opt. Mater. Express
7
, 1514
(2017
). 32.
T.
Schröder
et al., Nat. Commun.
8
, 15376
(2017
). 33.
J. F.
Ziegler
, J. P.
Biersack
, and M. D.
Ziegler
, SRIM: The Stopping and Range of Ions in Matter (SRIM Co., Morrisville, NC, 2008).34.
D.
Goebl
, K.
Khalal-Kouache
, D.
Roth
, E.
Steinbauer
, and P.
Bauer
, Phys. Rev. A
88
, 032901
(2013
). 35.
P.
Sigmund
, Stopping of Slow Ions
(Springer International Publishing
, Cham
, 2014
), pp. 343
–415
.36.
H.
Gümüş
and A.
Bentabet
, Appl. Phys. A
123
, 334
(2017
). 37.
P. F. P.
Fichtner
, M.
Behar
, D.
Fink
, P.
Goppelt
, and P. L.
Grande
, Nucl. Instrum. Methods Phys. Res. B
64
, 668
(1992
). 38.
Y.
Zhang
, I.-T.
Bae
, K.
Sun
, C.
Wang
, M.
Ishimaru
, Z.
Zhu
, W.
Jiang
, and W. J.
Weber
, J. Appl. Phys.
105
, 104901
(2009
). 39.
Y.
Zhang
, M.
Ishimaru
, J.
Jagielski
, W.
Zhang
, Z.
Zhu
, L. V.
Saraf
, W.
Jiang
, L.
Thome
, and W. J
Weber
, J. Phys. D: Appl. Phys.
43
, 085303
(2010
). 40.
C.
Lan
, J. M.
Xue
, Y.
Zhang
, J. R.
Morris
, Z.
Zhu
, Y.
Gao
, Y. G.
Wang
, S.
Yan
, and W. J.
Weber
, Nucl. Instrum. Methods Phys. Res. B
286
, 45
(2012
). 41.
S.
Moll
, Y.
Zhang
, Z.
Zhu
, P. D.
Edmondson
, F.
Namavar
, and W. J.
Weber
, Nucl. Instrum. Methods Phys. Res. B
307
, 93
(2013
). 42.
H. O.
Funsten
, S. M.
Ritzau
, R. W.
Harper
, and R.
Korde
, IEEE Trans. Nucl. Sci.
48
, 1785
(2001
). 43.
T.
Hopf
, C.
Yang
, S. E.
Andresen
, and D. N.
Jamieson
, J. Phys.: Condens. Matter
20
, 415205
(2008
). 44.
M. T.
Robinson
and O. S.
Oen
, Appl. Phys. Lett.
2
, 30
(1963
). 45.
D. S.
Gemmell
, Rev. Mod. Phys.
46
, 129
(1974
). 46.
G.
Hobler
, Radiat. Eff. Defects Solids
139
, 21
(1996
). 47.
M.
Morita
, T.
Ohmi
, E.
Hasegawa
, M.
Kawakami
, and M.
Ohwada
, J. Appl. Phys.
68
, 1272
(1990
). 48.
49.
II-VI Incorporated, Ion implantation. retrieved 23 October 2021, see https://ii-vi.com/product/ion-implantation/.
50.
S.
Chehreh Chelgani
and B.
Hart
, Miner. Eng.
57
, 1
(2014
). 51.
EAG Laboratories, Secondary ion mass spectrometry (SIMS). retrieved 23 October 2021, see: https://www.eag.com/techniques/mass-spec/secondary-ion-mass-spectrometry-sims/.
52.
W.
Möller
and W.
Eckstein
, Nucl. Instrum. Methods Phys. Res. B
2
, 814
(1984
). 53.
G.
Vizkelethy
, B. L.
Doyle
, and F. L.
McDaniel
, Nucl. Instrum. Methods Phys. Res. B
273
, 222
(2012
). 54.
M.
Mayer
, SIMNRA User’s Guide, Report IPP 9/113, 1997.55.
K.
Jin
, Y.
Zhang
, Z.
Zhu
, D. A.
Grove
, H.
Xue
, J.
Xue
, and W. J.
Weber
, J. Appl. Phys.
115
, 044903
(2014
). © 2021 Author(s). Published under an exclusive license by the AVS.
2021
Author(s)
You do not currently have access to this content.
