Electrochemical potentiostatic activation (EPA) is applied to AlGaN-based deep-ultraviolet (DUV) light-emitting diodes (LEDs). The effects of EPA on DUV LEDs are disclosed by analyzing the temperature-dependent current-voltage characteristics. EPA-treated DUV LEDs show improved electrical optical properties with suppressed forward leakage currents, reduced operation voltages, smaller ideality factors, and enhanced light emission compared to the reference device. EPA treatment yields distinct differences in carrier conduction across the p-AlGaN layer. The limited conductivity of the p-AlGaN layer in a DUV LED causes space-charge-limited (SCL)-like conduction behavior in the voltage regime far exceeding the turn-on voltage. EPA treatment alleviates the SCL-like conduction, which infers the improved conductivity of the p-AlGaN layer. In the same vein, the occurrence of high-level injection is retarded in the EPA-treated device, which is also consistent with enhanced conductivity of the p-AlGaN layer that mitigates asymmetry between n- and p-type conductivities of a DUV LED. Thus, the improved performance of AlGaN-based DUV LED is attributed to the promoted charge transport, which is enabled by the EPA-induced enhanced p-type conductivity.

1.
S.
Nakamura
,
N.
Iwasa
,
M.
Senoh
, and
T.
Mukai
,
Jpn. J. Appl. Phys.
31
,
1258
(
1992
).
2.
M. S.
Brandt
,
N. M.
Johnson
,
R. J.
Molnar
,
R.
Singh
, and
T. D.
Moustakas
,
Appl. Phys. Lett.
64
,
2264
(
1994
).
3.
H.
Amano
,
M.
Kito
,
K.
Hiramatsu
, and
I.
Akasaki
,
Jpn. J. Appl. Phys.
28
,
L2112
(
1989
).
4.
S.
Nakamura
,
T.
Mukai
,
M.
Senoh
, and
N.
Iwasa
,
Jpn. J. Appl. Phys.
31
,
L139
(
1992
).
5.
S.
Nakamura
,
T.
Mukai
, and
M.
Senoh
,
Appl. Phys. Lett.
64
,
1687
(
1994
).
6.
E. F.
Schubert
and
J. K.
Kim
,
Science
308
,
1274
(
2005
).
7.
P. V.
Dollen
,
S.
Pimputkar
, and
J. S.
Speck
,
Angew. Chem. Int. Ed.
53
,
13978
(
2014
).
8.
J.
Cho
,
J. H.
Park
,
J. K.
Kim
, and
E. F.
Schubert
,
Laser Photonics Rev.
11
,
1600147
(
2017
).
9.
D. S.
Meyaard
,
G.-B.
Lin
,
Q.
Shan
,
J.
Cho
,
E. F.
Schubert
,
H.
Shim
,
M.-H.
Kim
, and
C.
Sone
,
Appl. Phys. Lett.
99
,
251115
(
2011
).
10.
J. H.
Park
,
J.
Cho
,
E. F.
Schubert
, and
J. K.
Kim
,
Energies
10
,
1277
(
2017
).
11.
W.
Götz
,
N. M.
Johnson
,
J.
Walker
,
D. P.
Bour
, and
R. A.
Street
,
Appl. Phys. Lett.
68
,
667
(
1996
).
12.
Y.
Taniyasu
,
M.
Kasu
, and
T.
Makimoto
,
Nature
441
,
325
(
2006
).
13.
J. H.
Park
,
D. Y.
Kim
,
E. F.
Schubert
,
J.
Cho
, and
J. K.
Kim
,
ACS Energy Lett.
3
,
655
(
2018
).
14.
M.
Kneissl
,
T.-Y.
Seong
,
J.
Han
, and
H.
Amano
,
Nat. Photon.
13
,
233
(
2019
).
15.
H. H.
Lee
,
G. C.
Hong
,
B. J.
Kim
,
K. G.
Sadasivam
,
J. K.
Lee
,
S.-W.
Ryu
,
S. J.
Son
,
K.-W.
Kwon
, and
Y.-H.
Kim
,
Electrochem. Solid-State Lett.
13
,
H122
(
2010
).
16.
M.
Oh
,
J. J.
Lee
,
J. K.
Lee
, and
H.
Kim
,
J. Alloys Compd.
585
,
414
(
2014
).
17.
E.
Jung
,
J. K.
Lee
,
Y.
Choi
, and
H.
Kim
,
J. Nanosci. Nanotechnol.
16
,
11771
(
2016
).
18.
J. K.
Lee
,
G. Y.
Hyeon
,
W. Z.
Tawfik
,
H. S.
Choi
,
S.-W.
Ryu
,
T.
Jeong
,
E.
Jung
, and
H.
Kim
,
J. Appl. Phys.
117
,
185702
(
2015
).
19.
See supplementary material at http://dx.doi.org/10.1116/6.0000827 for EPA-induced H concentration change in p-AlGaN layers and for emission spectrum of DUV LEDs.
20.
D.
Yan
,
H.
Lu
,
D.
Chen
,
R.
Zhang
, and
Y.
Zheng
,
Appl. Phys. Lett.
96
,
83504
(
2010
).
21.
P.
Perlin
,
Marek
Osinski
,
P. G.
Eliseev
,
V. A.
Smagley
,
J.
Mu
,
M.
Banas
, and
P.
Sartori
,
Appl. Phys. Lett.
69
,
1680
(
1996
).
22.
J. M.
Shah
,
Y.-L.
Li
,
Th.
Gessmann
, and
E. F.
Schubert
,
J. Appl. Phys.
94
,
2627
(
2003
).
23.
K.
Mayes
,
A.
Yasan
,
R.
McClintock
,
D.
Shiell
,
S. R.
Darvish
,
P.
Kung
, and
M.
Razeghi
,
Appl. Phys. Lett.
84
,
1046
(
2004
).
24.
E. F.
Schubert
,
Light-Emitting Diodes
, 2nd ed. (
Cambridge University
,
Cambridge
,
2006
).
25.
M. A.
Lampert
,
Rep. Prog. Phys.
27
,
329
(
1964
).
26.
V. K.
Mathur
and
R. P.
Dahiya
,
Solid-State Electron.
17
,
61
(
1974
).
27.
D.-P.
Han
,
H.
Kim
,
J.-I.
Shim
,
D.-S.
Shin
, and
K.-S.
Kim
,
Appl. Phys. Lett.
105
,
191114
(
2014
).
28.
J. H.
Park
,
J. K.
Kim
, and
J.
Cho
,
Mater. Lett.
214
,
217
(
2018
).
29.
D. S.
Meyaard
,
G.-B.
Lin
,
J.
Cho
,
E. F.
Schubert
,
H.
Shim
,
S.-H.
Han
,
M.-H.
Kim
,
C.
Sone
, and
Y. S.
Kim
,
Appl. Phys. Lett.
102
,
251114
(
2013
).

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