Single-crystalline aluminum (Al) films are grown on GaAs (100) substrates by molecular beam epitaxy. The Al/GaAs interface is modified by ErAs insertion, and the Al quality is further improved. The full-width at half-maximum for Al (111) diffraction peak is 0.06°, and the root-mean-square surface roughness is 0.69 nm. In addition, the Al growth orientation can be tuned by ErAs insertion, which is attributed to the smaller lattice mismatch and higher surface symmetry provided by ErAs. The interfacial interdiffusion between Al and GaAs can be suppressed by ErAs as well. The sharp interfaces as well as the high quality of Al are confirmed by cross-sectional transmission electron microscopy studies. The lattice arrangements of the two stable Al/GaAs and Al/ErAs structures are proposed to show that the lattice matching and the interfacial bonding are two main driving forces.
Skip Nav Destination
Article navigation
December 2020
Letter|
November 05 2020
Interfacial modulation on single-crystalline aluminum films grown on GaAs by ErAs insertion
Kedong Zhang
;
Kedong Zhang
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Rui Pan;
Rui Pan
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Shunji Xia;
Shunji Xia
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Wangwei Zhang;
Wangwei Zhang
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Menglin Chang;
Menglin Chang
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Yuanfeng Ding;
Yuanfeng Ding
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Chen Li;
Chen Li
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Yu Deng;
Yu Deng
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Hong Lu
;
Hong Lu
a)
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
2
Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University
, Nanjing 210093, China
3
Collaborative Innovation Center of Advanced Microstructures, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
Yan-Feng Chen
Yan-Feng Chen
1
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University
, Nanjing 210093, China
Search for other works by this author on:
a)
Electronic mail: hlu@nju.edu.cn
Note: This paper is part of the Special Topic Collection: Honoring Dr. Art Gossard's 85th Birthday and his Leadership in the Science and Technology of Molecular Beam Epitaxy.
J. Vac. Sci. Technol. A 38, 060402 (2020)
Article history
Received:
August 08 2020
Accepted:
October 06 2020
Citation
Kedong Zhang, Rui Pan, Shunji Xia, Wangwei Zhang, Menglin Chang, Yuanfeng Ding, Chen Li, Yu Deng, Hong Lu, Yan-Feng Chen; Interfacial modulation on single-crystalline aluminum films grown on GaAs by ErAs insertion. J. Vac. Sci. Technol. A 1 December 2020; 38 (6): 060402. https://doi.org/10.1116/6.0000530
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00