3D printing offers enormous potential for fabricating custom equipment for space and vacuum systems, but in order to do this at low costs, polymers are necessary. Historically, polymers have not been suitable for these applications because of outgassing, but if coated with a conformal, inorganic film introduced with atomic layer deposition (ALD), then outgassing can be reduced. Previous work on coating ALD layers showed promise with heavily outgassing carbon black containing 3D printed polymers. In this study, ALD aluminum oxide and a commercially available vacuum sealant resin were used to coat clear, acrylonitrile butadiene styrene, polycarbonate, and polypropylene. Characterization of the films included spectroscopic ellipsometry for thickness, microstructure analysis with scanning electron microscopy, chemical analysis with energy-dispersive x-ray spectroscopy, and residual gas analysis to study relative change in outgassing. ALD-coated samples registered lower pressures than the resin-coated ones. The results showed that the ALD coatings could effectively inoculate unpigmented 3D printed plastics, which could be used in contamination-sensitive environments such as semiconductor processing systems and space environments.
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September 2020
Research Article|
August 14 2020
Vacuum outgassing characteristics of unpigmented 3D printed polymers coated with atomic layer deposited alumina
Nupur Bihari
;
Nupur Bihari
1
Department of Materials Science and Engineering, Michigan Technological University
, Houghton, Michigan 49931
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Ismo T. S. Heikkinen
;
Ismo T. S. Heikkinen
2
Department of Electronics and Nanoengineering, School of Electrical Engineering, Aalto University
, Espoo FI-00076, Finland
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Giovanni Marin;
Giovanni Marin
3
Department of Chemistry and Materials Science, School of Chemical Engineering, Aalto University
, Espoo FI-00076, Finland
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Craig Ekstrum;
Craig Ekstrum
1
Department of Materials Science and Engineering, Michigan Technological University
, Houghton, Michigan 49931
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Pierce J. Mayville;
Pierce J. Mayville
1
Department of Materials Science and Engineering, Michigan Technological University
, Houghton, Michigan 49931
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Shane Oberloier;
Shane Oberloier
4
Department of Electrical and Computer Engineering, Michigan Technological University
, Houghton, Michigan 49931
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Hele Savin
;
Hele Savin
2
Department of Electronics and Nanoengineering, School of Electrical Engineering, Aalto University
, Espoo FI-00076, Finland
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Maarit Karppinen
;
Maarit Karppinen
3
Department of Chemistry and Materials Science, School of Chemical Engineering, Aalto University
, Espoo FI-00076, Finland
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Joshua M. Pearce
Joshua M. Pearce
a)
1
Department of Materials Science and Engineering, Michigan Technological University
, Houghton, Michigan 499312
Department of Electronics and Nanoengineering, School of Electrical Engineering, Aalto University
, Espoo FI-00076, Finland
4
Department of Electrical and Computer Engineering, Michigan Technological University
, Houghton, Michigan 49931
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a)
Electronic mail: pearce@mtu.edu
Journal of Vacuum Science & Technology A 38, 053204 (2020)
Article history
Received:
March 07 2020
Accepted:
July 21 2020
Citation
Nupur Bihari, Ismo T. S. Heikkinen, Giovanni Marin, Craig Ekstrum, Pierce J. Mayville, Shane Oberloier, Hele Savin, Maarit Karppinen, Joshua M. Pearce; Vacuum outgassing characteristics of unpigmented 3D printed polymers coated with atomic layer deposited alumina. Journal of Vacuum Science & Technology A 1 September 2020; 38 (5): 053204. https://doi.org/10.1116/6.0000178
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