The performance and calibration of an XPS instrument can change with time. Changes may be gradual so that users may not notice them from day to day unless they actively compare the current performance of the instrument with its recently optimized performance. This publication describes a method by which such a comparison may be made very rapidly. A tool, based on a Microsoft Excel workbook, has been made available to assist in the comparison and to highlight aspects of an instrument's performance which might have changed significantly. The whole procedure is rapid, minimizing the impact on both instrument availability and user time. This means that it may be followed frequently without significantly affecting laboratory throughput.
REFERENCES
1.
D. R.
Baer
and I. S.
Gilmore
, J. Vac. Sci. Technol. A.
36
, 068502
(2018
). 2.
W. E. S.
Unger
, J. Vac. Sci. Technol. A
38
, 021201
(2020
). 3.
D. R.
Baer
et al., J. Vac. Sci. Technol. A
37
, 031401
(2019
). 4.
B. P.
Reed
, S. J.
Spencer
, and A. G.
Shard
, VAMAS TWA 2, Sub-project A27
(NPL, 2019
). (Reed, B P; Spencer, S J; Shard, A G (2019) VAMAS TWA 2, 2019, sub-project A27:" intensity calibration for XPS instruments using low-density poly(ethylene)": protocol for analysis. NPL Report. AS 100)5.
C. J.
Powell
, J. Electron Spectrosc. Relat. Phenom.
(2019
), see https://www.sciencedirect.com/science/article/abs/pii/S0368204818301956.6.
ISO 18116:2005
, Surface Chemical Analysis—Guidelines for Preparation and Mounting of Specimens for Analysis
(ISO, 2005
).7.
ASTM E1829
, 14 Standard Guide for Handling Specimens Prior to Surface Analysis
(ASTM, 2014
).
8.
ASTM E1078
, 14 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
(ASTM, 2014
).9.
L.-S.
Johannson
and J. M.
Campbell
, Surf. Interface Anal.
36
, 1018
(2004
). 10.
L.-S.
Johannson
, Surf. Sci.
584
, 126
(2005
). 11.
C. D.
Easton
, C.
Kinnear
, S. L.
McArthur
, and T. R.
Gengenbach
, J. Vac. Sci. Technol. A
38
, 023207
(2020
). 12.
D. R.
Baer
et al., J. Vac. Sci. Technol. A
38
, 031204
(2020
). 13.
J. E.
Castle
and C. J.
Powell
, Surf. Interface Anal.
36
, 225
(2004
). 14.
See supplementary material at http:dx.doi.org/10.1116/6.0000224 for the Microsoft Excel file named “XPS Rapid Checks.xlsm,” which provides a tool allowing very rapid comparison of two pairs of spectra.
© 2020 Author(s).
2020
Author(s)
You do not currently have access to this content.