Atomic layer deposition (ALD) is a versatile gas phase coating technique that allows coating of complex structured materials, as well as high-surface area materials such as nanoparticles. In this work, ALD is used to deposit a lutetium oxide layer on TiO2 nanoparticles (P25) in a fluidized bed reactor to produce particles for nuclear medical applications. Two precursors were tested: the commercially available Lu(TMHD)3 and the custom-made Lu(HMDS)3. Using Lu(TMHD)3, a lutetium loading up to 15 wt. % could be obtained, while using Lu(HMDS)3, only 0.16 wt. % Lu could be deposited due to decomposition of the precursor. Furthermore, it was observed that vibration-assisted fluidization allows for better fluidization of the nanoparticles and hence a higher degree of coating.
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March 2020
Research Article|
February 12 2020
Lutetium coating of nanoparticles by atomic layer deposition Available to Purchase
Special Collection:
Special Topic Collection on Atomic Layer Deposition (ALD)
Josette L. T. M. Moret;
Josette L. T. M. Moret
1
Applied Radiation and Isotopes, Applied Sciences, Delft University of Technology
, Delft 2629 JB, The Netherlands
2
Product and Process Engineering, Applied Sciences, Delft University of technology
, Delft 2629 HZ, The Netherlands
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Matthew B. E. Griffiths
;
Matthew B. E. Griffiths
3
Department of Chemistry, Carleton University
, Ottawa, Ontario, K1S 5B6, Canada
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Jeannine E. B. M. Frijns;
Jeannine E. B. M. Frijns
2
Product and Process Engineering, Applied Sciences, Delft University of technology
, Delft 2629 HZ, The Netherlands
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Baukje E. Terpstra;
Baukje E. Terpstra
1
Applied Radiation and Isotopes, Applied Sciences, Delft University of Technology
, Delft 2629 JB, The Netherlands
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Hubert T. Wolterbeek;
Hubert T. Wolterbeek
1
Applied Radiation and Isotopes, Applied Sciences, Delft University of Technology
, Delft 2629 JB, The Netherlands
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Seán T. Barry
;
Seán T. Barry
3
Department of Chemistry, Carleton University
, Ottawa, Ontario, K1S 5B6, Canada
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Antonia G. Denkova;
Antonia G. Denkova
1
Applied Radiation and Isotopes, Applied Sciences, Delft University of Technology
, Delft 2629 JB, The Netherlands
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J. Ruud van Ommen
J. Ruud van Ommen
2
Product and Process Engineering, Applied Sciences, Delft University of technology
, Delft 2629 HZ, The Netherlands
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Josette L. T. M. Moret
1,2
Matthew B. E. Griffiths
3
Jeannine E. B. M. Frijns
2
Baukje E. Terpstra
1
Hubert T. Wolterbeek
1
Seán T. Barry
3
Antonia G. Denkova
1
J. Ruud van Ommen
2
1
Applied Radiation and Isotopes, Applied Sciences, Delft University of Technology
, Delft 2629 JB, The Netherlands
2
Product and Process Engineering, Applied Sciences, Delft University of technology
, Delft 2629 HZ, The Netherlands
3
Department of Chemistry, Carleton University
, Ottawa, Ontario, K1S 5B6, Canada
Note: This paper is part of the 2020 Special Topic Collection on Atomic Layer Deposition (ALD).
J. Vac. Sci. Technol. A 38, 022414 (2020)
Article history
Received:
October 30 2019
Accepted:
January 16 2020
Citation
Josette L. T. M. Moret, Matthew B. E. Griffiths, Jeannine E. B. M. Frijns, Baukje E. Terpstra, Hubert T. Wolterbeek, Seán T. Barry, Antonia G. Denkova, J. Ruud van Ommen; Lutetium coating of nanoparticles by atomic layer deposition. J. Vac. Sci. Technol. A 1 March 2020; 38 (2): 022414. https://doi.org/10.1116/1.5134446
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