Over the past three decades, the widespread utility and applicability of x-ray photoelectron spectroscopy (XPS) in research and applications has made it the most popular and widely used method of surface analysis. Associated with this increased use has been an increase in the number of new or inexperienced users, which has led to erroneous uses and misapplications of the method. This article is the first in a series of guides assembled by a committee of experienced XPS practitioners that are intended to assist inexperienced users by providing information about good practices in the use of XPS. This first guide outlines steps appropriate for determining whether XPS is capable of obtaining the desired information, identifies issues relevant to planning, conducting, and reporting an XPS measurement, and identifies sources of practical information for conducting XPS measurements. Many of the topics and questions addressed in this article also apply to other surface-analysis techniques.
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Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements
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Research Article|
April 08 2019
Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements

Donald R. Baer
;
Donald R. Baer
a)
1
Pacific Northwest National Laboratory, Environmental Molecular Sciences Laboratory
, P.O. Box 999, Richland, Washington 99352
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Kateryna Artyushkova
;
Kateryna Artyushkova
2
Physical Electronics Inc.
, Chanhassen, Minnesota 55317
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Christopher Richard Brundle;
Christopher Richard Brundle
3
C R Brundle & Associates
, 4215 Fairway Drive, Soquel, California 95073
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James E. Castle;
James E. Castle
4
Department of Mechanical Engineering Science, University of Surrey
, Guildford, Surrey GU2 7XH, United Kingdom
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Mark H. Engelhard
;
Mark H. Engelhard
1
Pacific Northwest National Laboratory, Environmental Molecular Sciences Laboratory
, P.O. Box 999, Richland, Washington 99352
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Karen J. Gaskell;
Karen J. Gaskell
5
Department of Chemistry and Biochemistry, University of Maryland
, College Park, Maryland 20720
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John T. Grant;
John T. Grant
6
Surface Analysis Consulting
, Clearwater, Florida 33767
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Richard T. Haasch
;
Richard T. Haasch
7
Materials Research Laboratory, University of Illinois
, 104 S. Goodwin Ave., Urbana, Illinois 61801-2902
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Matthew R. Linford;
Matthew R. Linford
8
Department of Chemistry and Biochemistry, Brigham Young University
, Provo, Utah 84602
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Cedric J. Powell;
Cedric J. Powell
9
National Institute of Standards and Technology
, 100 Bureau Drive, Gaithersburg, Maryland 20899-8370
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Alexander G. Shard;
Alexander G. Shard
10
National Physical Laboratory
, Teddington TW11 0LW, United Kingdom
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Peter M. A. Sherwood;
Peter M. A. Sherwood
11
Department of Chemistry, University of Washington
, Seattle, Washington 98950
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Vincent S. Smentkowski
Vincent S. Smentkowski
12
General Electric Global Research
, 1 Research Circle, Bldg K1 1D41, Niskayuna, New York 12309
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a)
Electronic mail: don.baer@pnnl.gov
J. Vac. Sci. Technol. A 37, 031401 (2019)
Article history
Received:
October 10 2018
Accepted:
March 04 2019
Connected Content
A correction has been published:
Erratum: “Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements” [J. Vac. Sci. Technol. A 37, 031401 (2019)]
A companion article has been published:
A practical X-ray photoelectron spectroscopy guide aims to improve the method’s widespread usage
Citation
Donald R. Baer, Kateryna Artyushkova, Christopher Richard Brundle, James E. Castle, Mark H. Engelhard, Karen J. Gaskell, John T. Grant, Richard T. Haasch, Matthew R. Linford, Cedric J. Powell, Alexander G. Shard, Peter M. A. Sherwood, Vincent S. Smentkowski; Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements. J. Vac. Sci. Technol. A 1 May 2019; 37 (3): 031401. https://doi.org/10.1116/1.5065501
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