Indium tantalum oxide thin film was deposited by sputtering using three different designs: 5–7 and 10–14 nm alternative layers of Ta2O5 and In2O3 and co-sputtering of In2O3 and Ta2O5. Then, as-deposited films were rapidly annealed at different temperatures to assess the thermal effects on microstructures and photocatalytic functions. Results from XRD and energy-dispersive x-ray spectrometer indicate that crystalline InTaO4 emerges in 5–7 and 10–14 nm stacks of films but absent in the co-sputtered films. Since crystalline InTaO4 is capable of photocatalysis under both ultraviolet and visible light, the authors particularly tested the annealed films in water to degrade methylene blue under visible light. The photo-induced degradation on methylene blue by 5–7 and 10–14 nm stacks can reach 45% after 6-h continuous exposure. Using UV-Visible-Near Infrared spectroscopy, the authors can estimate the optical bandgaps in these annealed films and from these estimations, a mechanism for the photocatalysis is discussed. This mechanism is similar to the other electron-hole separation and transfer across the heterogeneous junctions in semiconductors.
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March 2019
Research Article|
February 25 2019
Photocatalytic study for indium tantalum oxide thin film in visible light
Special Collection:
Special Topic Collection on Complex Oxides
Chuan Li;
Chuan Li
a)
1
Department of Biomedical Engineering, National Yang Ming University
, Taipei 11221, Taiwan
2
Department of Mechanical Engineering, National Central University
, Jhongli, Taoyuan 32001, Taiwan
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Joe Jang-Hsin Hsieh;
Joe Jang-Hsin Hsieh
3
Department of Materials Engineering, Ming Chi University of Technology
, Taishan, Taipei 24301, Taiwan
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Po Hui Hsueh
Po Hui Hsueh
2
Department of Mechanical Engineering, National Central University
, Jhongli, Taoyuan 32001, Taiwan
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a)
Electronic mail: [email protected]
Note: This paper is part of the Special Topic Collection on Complex Oxides.
J. Vac. Sci. Technol. A 37, 021515 (2019)
Article history
Received:
December 14 2018
Accepted:
February 05 2019
Citation
Chuan Li, Joe Jang-Hsin Hsieh, Po Hui Hsueh; Photocatalytic study for indium tantalum oxide thin film in visible light. J. Vac. Sci. Technol. A 1 March 2019; 37 (2): 021515. https://doi.org/10.1116/1.5085767
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