Transition metal oxides are being increasingly used in many applications like nonvolatile memory, contacts to transition metal dichalcogenide transistors and photovoltaics, and thin-film transistors, to name a few, because the conductivity can be tuned by defect doping. The mechanism of conduction through substoichiometric oxides is however not well understood. Earlier studies attributed the conduction in substoichiometric oxides to Poole–Frenkel emission. But the assumptions underlying the Poole–Frenkel model break down in thin dielectrics and when a broad range of temperature is considered. The authors model the conduction through substoichiometric nickel oxide (NiOx) using a kinetic Monte-Carlo framework based on trap-assisted tunneling (TAT), by studying devices made of metal/NiOx/Si stacks. Modeling the temperature dependence of I–V characteristics enables the extraction of the trap parameters, like trap ionization energy and trap relaxation energy. The authors study the effects of the UV/ozone treatment, which has been shown to reduce the resistivity of NiOx by orders of magnitude, as well as the choice of metal electrode on the trap properties. The high trap relaxation energy (∼1.6 eV) is identified as an important factor in limiting the effectiveness of defect doping in NiOx, because it hinders the carrier emission step of the TAT process. The relaxation energy is another design knob that can be used when screening oxide candidates for various applications.
Skip Nav Destination
Article navigation
March 2019
Research Article|
January 14 2019
On the limit of defect doping in transition metal oxides
Special Collection:
Special Topic Collection on Complex Oxides
Aravindh Kumar;
Aravindh Kumar
a)
1
Department of Electrical Engineering, Stanford University
, Stanford, California 94305
Search for other works by this author on:
Raisul Islam;
Raisul Islam
1
Department of Electrical Engineering, Stanford University
, Stanford, California 94305
Search for other works by this author on:
Dipankar Pramanik;
Dipankar Pramanik
2
MDLSoft Inc.
, 5201 Great America Parkway, Santa Clara, California 95054
Search for other works by this author on:
Krishna Saraswat
Krishna Saraswat
1
Department of Electrical Engineering, Stanford University
, Stanford, California 94305
Search for other works by this author on:
a)
Electronic mail: [email protected]
Note: This paper is part of the Special Topic Collection on Complex Oxides.
J. Vac. Sci. Technol. A 37, 021505 (2019)
Article history
Received:
September 07 2018
Accepted:
December 26 2018
Citation
Aravindh Kumar, Raisul Islam, Dipankar Pramanik, Krishna Saraswat; On the limit of defect doping in transition metal oxides. J. Vac. Sci. Technol. A 1 March 2019; 37 (2): 021505. https://doi.org/10.1116/1.5055563
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Surface passivation approaches for silicon, germanium, and III–V semiconductors
Roel J. Theeuwes, Wilhelmus M. M. Kessels, et al.
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
Thorsten Lill, Mingmei Wang, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Related Content
Carrier-selective interlayer materials for silicon solar cell contacts
J. Appl. Phys. (April 2018)
High performance p-type NiOx thin-film transistor by Sn doping
Appl. Phys. Lett. (June 2016)
Leakage current reduction in β-Ga2O3 Schottky barrier diode with p-NiOx guard ring
Appl. Phys. Lett. (November 2022)
Effect of 20 MeV proton irradiation on the electrical properties of NiOx/β-Ga2O3 p–n diodes
Appl. Phys. Lett. (November 2024)
Conformal SnO2 and NiOx charge transport layers for pragmatic air-processed perovskite solar cells
Appl. Phys. Lett. (October 2024)