Cold atmospheric plasmas are generous sources of chemically active species, the reaction rates which can be predicted only if the electron number density and the electron energy distribution function are known. Here, the authors present a procedure for estimating both these parameters from the optical emission spectrum of an argon plasma. The peaks in the spectrum were curve fitted with Voigt profiles, and their widths and areas were mapped to the number density and energy distribution of electrons in the plasma, using the mathematical models for Stark broadening and Corona population, respectively. These plasma parameters were optimized to establish a good match between the simulated and the experimental peak attributes. This analysis estimated the value of the electron number density to be approximately 1.5 × 1015 cm−3 and the mean electron temperature to be approximately 0.37 eV in their plasma. It also predicted that the energy distribution of electrons can be closely approximated using a Maxwellian distribution.
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July 2018
Research Article|
July 03 2018
Estimating the number density and energy distribution of electrons in a cold atmospheric plasma using optical emission spectroscopy Available to Purchase
Venu Anand;
Venu Anand
a)
National Institute of Technology Calicut
, Calicut 673601, India
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Aswathi Nair;
Aswathi Nair
Department of Instrumentation and Applied Physics (IAP), Indian Institute of Science (IISc)
, Bangalore 560012, India
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Anbuselvan Karur Karunapathy Nagendirakumar;
Anbuselvan Karur Karunapathy Nagendirakumar
Department of Aerospace Engineering, Indian Institute of Science (IISc)
, Bangalore 560012, India
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Mohan Rao Gowravaram
Mohan Rao Gowravaram
Department of Instrumentation and Applied Physics (IAP), Indian Institute of Science (IISc)
, Bangalore 560012, India
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Venu Anand
a)
National Institute of Technology Calicut
, Calicut 673601, India
Aswathi Nair
Department of Instrumentation and Applied Physics (IAP), Indian Institute of Science (IISc)
, Bangalore 560012, India
Anbuselvan Karur Karunapathy Nagendirakumar
Department of Aerospace Engineering, Indian Institute of Science (IISc)
, Bangalore 560012, India
Mohan Rao Gowravaram
Department of Instrumentation and Applied Physics (IAP), Indian Institute of Science (IISc)
, Bangalore 560012, India
a)
Electronic addresses: [email protected]; [email protected]
J. Vac. Sci. Technol. A 36, 04F407 (2018)
Article history
Received:
January 21 2018
Accepted:
June 18 2018
Citation
Venu Anand, Aswathi Nair, Anbuselvan Karur Karunapathy Nagendirakumar, Mohan Rao Gowravaram; Estimating the number density and energy distribution of electrons in a cold atmospheric plasma using optical emission spectroscopy. J. Vac. Sci. Technol. A 1 July 2018; 36 (4): 04F407. https://doi.org/10.1116/1.5023107
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