Deposition of IRMOF-8 thin films by atomic layer deposition was studied at 260–320 °C. Zinc acetate and 2,6-naphthalenedicarboxylic acid were used as the precursors. The as-deposited amorphous films were crystallized in 70% relative humidity at room temperature resulting in an unknown phase with a large unit cell. An autoclave with dimethylformamide as the solvent was used to recrystallize the films into IRMOF-8 as confirmed by grazing incidence x-ray diffraction. The films were further characterized by high temperature x-ray diffraction (HTXRD), field emission scanning electron microscopy, Fourier transform infrared spectroscopy (FTIR), time-of-flight elastic recoil detection analysis (TOF-ERDA), nanoindentation, and energy-dispersive x-ray spectroscopy. HTXRD measurements revealed similar behavior to bulk IRMOF-8. According to TOF-ERDA and FTIR, composition of the films was similar to IRMOF-8. Through-porosity was confirmed by loading the films with palladium using Pd(thd)2 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) as the precursor.

1.
M.
Eddaoudi
,
J.
Kim
,
N.
Rosi
,
D.
Vodak
,
J.
Wachter
,
M.
O'Keeffe
, and
O. M.
Yaghi
,
Science
295
,
469
(
2002
).
2.
N. L.
Rosi
,
J.
Eckert
,
M.
Eddaoudi
,
D. T.
Vodak
,
J.
Kim
,
M.
O'Keeffe
, and
O. M.
Yaghi
,
Science
300
,
1127
(
2003
).
3.
S.
Hermes
,
M. K.
Schroter
,
R.
Schmid
,
L.
Khodeir
,
M.
Muhler
,
A.
Tissler
,
R. W.
Fischer
, and
R. A.
Fischer
,
Angew. Chem., Int. Ed.
44
,
6237
(
2005
).
4.
P.
Horcajada
,
C.
Serre
,
G.
Maurin
,
N. A.
Ramsahye
,
F.
Balas
,
M.
Vallet-Regi
,
M.
Sebban
,
F.
Taulelle
, and
G.
Ferey
,
J. Am. Chem. Soc.
130
,
6774
(
2008
).
5.
Y. S.
Li
,
F. Y.
Liang
,
H. G.
Bux
,
W. S.
Yang
, and
J.
Caro
,
J. Membr. Sci.
354
,
48
(
2010
).
6.
G.
Lu
and
J. T.
Hupp
,
J. Am. Chem. Soc.
132
,
7832
(
2010
).
7.
H. Fanø
Clausen
,
R. Damgaard
Poulsen
,
A. D.
Bond
,
M.-A. S.
Chevalier
, and
B. Brummerstedt
Iversen
,
J. Solid State Chem.
178
,
3342
(
2005
).
8.
Y.
Yoo
and
H. K.
Jeong
,
Chem. Commun.
21
,
2441
(
2008
).
9.
Y.
Yoo
,
Z. P.
Lai
, and
H. K.
Jeong
,
Microporous Mesoporous Mater.
123
,
100
(
2009
).
10.
P.
Horcajada
,
C.
Serre
,
D.
Grosso
,
C.
Boissiere
,
S.
Perruchas
,
C.
Sanchez
, and
G.
Ferey
,
Adv. Mater.
21
,
1931
(
2009
).
11.
U.
Müller
,
H.
Pütter
,
M.
Hesse
, and
H.
Wessel
, WO2005/049892 A1 (2 June 2005).
12.
U.
Müller
,
H.
Pütter
,
M.
Hesse
,
M.
Schubert
,
H.
Wessel
,
J.
Huff
, and
M.
Guzmann
, US2011/105776 A1 (5 May 2011).
13.
O.
Shekhah
 et al,
J. Am. Chem. Soc.
129
,
15118
(
2007
).
14.
M.
Ritala
and
J.
Niinistö
,
Chemical Vapour Deposition: Precursors, Processes and Applications
, edited by
A. C.
Jones
and
M. L.
Hitchman
(
The Royal Society of Chemistry
,
Cambridge, U.K.
,
2009
), pp.
158
206
.
15.
M.
Putkonen
,
J.
Harjuoja
,
T.
Sajavaara
, and
L.
Niinistö
,
J. Mater. Chem.
17
,
664
(
2007
).
16.
T.
Yoshimura
,
S.
Tasuura
, and
W.
Sotoyama
,
Appl. Phys. Lett.
59
,
482
(
1991
).
17.
H. I.
Shao
,
S.
Umemoto
,
T.
Kikutani
, and
N.
Okui
,
Polymer
38
,
459
(
1997
).
18.
A. A.
Dameron
,
D.
Saghete
,
B. B.
Burton
,
S. D.
Davidson
,
A. S.
Cavanagh
,
J. A.
Bertand
, and
S. M.
George
,
Chem. Mater.
20
,
3315
(
2008
).
19.
O.
Nilsen
,
K. B.
Klepper
,
H. Ø.
Nielsen
, and
H.
Fjellvåg
,
ECS Trans.
16
,
3
(
2008
).
20.
Q.
Peng
,
B.
Gong
,
R. M.
VanGundy
, and
G. N.
Parsons
,
Chem. Mater.
21
,
820
(
2009
).
21.
L. D.
Salmi
,
E.
Puukilainen
,
M.
Vehkamäki
,
M. J.
Heikkilä
, and
M.
Ritala
,
Chem. Vap. Deposition
15
,
221
(
2009
).
22.
L. D.
Salmi
,
M. J.
Heikkilä
,
E.
Puukilainen
,
T.
Sajavaara
,
D.
Grosso
, and
M.
Ritala
,
Microporous Mesoporous Mater.
182
,
147
(
2013
).
23.
M.
Ylilammi
and
T.
Ranta-aho
,
Thin Solid Films
232
,
56
(
1993
).
24.
K.
Uemura
,
R.
Matsuda
, and
S.
Kitagawa
,
J. Solid State Chem.
178
,
2420
(
2005
).
25.
L. T. L.
Nguyen
,
C. V.
Nguyen
,
G. H.
Dang
,
K. K. A.
Le
, and
N. T. S.
Phan
,
J. Mol. Catal. A: Chem.
349
,
28
(
2011
).
26.
C.-Y.
Wang
,
C.-S.
Tsao
,
M.-S.
Yu
,
P.-Y.
Liao
,
T.-Y.
Chung
,
H.-C.
Wu
,
M. A.
Miller
, and
Y.-R.
Tzeng
,
J. Alloys Compd.
492
,
88
(
2010
).
27.
S.
Hermes
,
F.
Schröder
,
S.
Amirjalayer
,
R.
Schmid
, and
R. A.
Fischer
,
J. Mater. Chem.
16
,
2464
(
2006
).
28.
D.
Esken
,
X.
Zhang
,
O. I.
Lebedev
,
F.
Schröder
, and
R. A.
Fischer
,
J. Mater. Chem.
19
,
1314
(
2009
).
29.
S.
Hermes
,
D.
Zacher
,
A.
Baunemann
,
C.
Wöll
, and
R. A.
Fischer
,
Chem. Mater.
19
,
2168
(
2007
).
You do not currently have access to this content.