Nanolaminate structures have many prospective uses in mechanical, electrical, and optical applications due to the wide selection of materials and precise control over layer thicknesses. In this work, ultrathin Al2O3/TiO2 nanolaminate structures deposited by atomic layer deposition from Me3Al, TiCl4, and H2O precursors with intended bilayer thicknesses ranging from 0.1 to 50 nm were characterized by x-ray reflectivity (XRR) measurements. The measurements were simulated to obtain values for thickness, density, and roughness of constituting layers. XRR analysis shows that the individual layers within the nanolaminate remain discrete for bilayers as thin as 0.8 nm. Further reduction in bilayer thickness produces a composite of the two materials.
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January 2014
Research Article|
December 02 2013
X-ray reflectivity characterization of atomic layer deposition Al2O3/TiO2 nanolaminates with ultrathin bilayers
Sakari Sintonen;
Sakari Sintonen
a)
Department of Micro- and Nanosciences, Aalto University School of Electrical Engineering
, Tietotie 3, 02150 Espoo, Finland
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Saima Ali;
Saima Ali
Department of Micro- and Nanosciences, Aalto University School of Electrical Engineering
, Tietotie 3, 02150 Espoo, Finland
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Oili M. E. Ylivaara;
Oili M. E. Ylivaara
VTT Technical Research Centre of Finland
, Tietotie 3, 02150 Espoo, Finland
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Riikka L. Puurunen;
Riikka L. Puurunen
VTT Technical Research Centre of Finland
, Tietotie 3, 02150 Espoo, Finland
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Harri Lipsanen
Harri Lipsanen
Department of Micro- and Nanosciences, Aalto University School of Electrical Engineering
, Tietotie 3, 02150 Espoo, Finland
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a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. A 32, 01A111 (2014)
Article history
Received:
September 03 2013
Accepted:
November 11 2013
Citation
Sakari Sintonen, Saima Ali, Oili M. E. Ylivaara, Riikka L. Puurunen, Harri Lipsanen; X-ray reflectivity characterization of atomic layer deposition Al2O3/TiO2 nanolaminates with ultrathin bilayers. J. Vac. Sci. Technol. A 1 January 2014; 32 (1): 01A111. https://doi.org/10.1116/1.4833556
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