Fine-grain graphite samples were exposed to high density low temperature () hydrogen plasmas in the Pilot-PSI linear plasma generator. Redeposition of eroded carbon is so strong that no external precursor gas injection is necessary for deposits to form on the exposed surface during the bombardment. In fact, up to 90% of carbon is redeposited, most noticeably in the region of the highest particle flux. The redeposits appear in the form of carbon microparticles of various sizes and structures. Discharge parameters influence the efficiency of the redeposition processes and the particle growth rate. Under favorable conditions, the growth rate reaches 0.15 μm/s. The authors used high resolution scanning electron microscopy and transmission electron microscopy to study the particle growth mode. The columnar structure of some of the large particles points toward surface growth, while observation of the spherical carbon nanoparticles indicates growth in the plasma phase. Multiple nanoparticles can agglomerate and form bigger particles. The spherical shape of the agglomerates suggests that nanoparticles coalesce in the gas phase. The erosion and redeposition patterns on the samples are likely determined by the gradients in plasma flux density and surface temperature across the surface.
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January 2013
Research Article|
December 07 2012
Reorganization of graphite surfaces into carbon micro- and nanoparticles under high flux hydrogen plasma bombardment
Kirill Bystrov;
Kirill Bystrov
a)
FOM Institute DIFFER-Dutch Institute for Fundamental Energy Research, Association EURATOM-FOM, Partner in the Trilateral Euregio Cluster
, P.O. Box 1207, NL-3430 BE Nieuwegein, The Netherlands
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Lenze van der Vegt;
Lenze van der Vegt
FOM Institute DIFFER-Dutch Institute for Fundamental Energy Research, Association EURATOM-FOM, Partner in the Trilateral Euregio Cluster
, P.O. Box 1207, NL-3430 BE Nieuwegein, The Netherlands
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Gregory De Temmerman;
Gregory De Temmerman
FOM Institute DIFFER-Dutch Institute for Fundamental Energy Research, Association EURATOM-FOM, Partner in the Trilateral Euregio Cluster
, P.O. Box 1207, NL-3430 BE Nieuwegein, The Netherlands
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Cécile Arnas;
Cécile Arnas
Laboratoire de Physique des Interactions Ioniques et Moléculaires (PIIM), CNRS/Aix-Marseille Université
, F-13397 Marseille, France
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Laurent Marot
Laurent Marot
Department of Physics, University of Basel
, Klingelbergstrasse 82, CH-4056 Basel, Switzerland
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a)
Electronic mail: k.bystrov@differ.nl
J. Vac. Sci. Technol. A 31, 011303 (2013)
Article history
Received:
July 16 2012
Accepted:
November 15 2012
Citation
Kirill Bystrov, Lenze van der Vegt, Gregory De Temmerman, Cécile Arnas, Laurent Marot; Reorganization of graphite surfaces into carbon micro- and nanoparticles under high flux hydrogen plasma bombardment. J. Vac. Sci. Technol. A 1 January 2013; 31 (1): 011303. https://doi.org/10.1116/1.4769733
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