Ionization vacuum gauges are used as secondary standards by calibration laboratories and as transfer standards in intercomparisons among metrology laboratories. A quantitative measurement of gauge stability with respect to the gauge calibration factor is critical for these applications. We report the long-term calibration stability of hot-filament metal-envelope enclosed ionization gauges based upon the analysis of repeat calibrations of nine gauges over a 15 year period. All of the gauges included in the study were of the same type: Bayard–Alpert type ionization gauges of an all-metal construction with an integral metal-envelope surrounding the hot-filament, grid, and collector. All were calibrated repeatedly at the National Institute of Standards and Technology (NIST) using the NIST high-vacuum standard but are owned by organizations external to NIST. The gauges were removed from the high-vacuum standard after calibration, shipped back to the gauge-owner, and were returned to NIST at a later date (more than 1 year) for recalibration. Gauge stability was determined using a pooled standard deviation (weighted root-mean-square average of individual gauge standard deviations) based on all calibration factors measured at NIST and was used to define the relative uncertainty component associated with long-term stability uLTS. We determined uLTS = 1.9% (k = 1) for gauges operated with 4 mA of emission current, and uLTS = 2.8% (k = 1) for gauges operated with 0.1 mA emission current.
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November 2012
Research Article|
September 12 2012
Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges Available to Purchase
James A. Fedchak;
James A. Fedchak
a)
National Institute of Standards and Technology, Sensor Science Division
, 100 Bureau Dr., MS 8364, Gaithersburg, Madrid 20899-8364
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Dana R. Defibaugh
Dana R. Defibaugh
National Institute of Standards and Technology, Sensor Science Division
, 100 Bureau Dr., MS 8364, Gaithersburg, Madrid 20899-8364
Search for other works by this author on:
James A. Fedchak
a)
Dana R. Defibaugh
National Institute of Standards and Technology, Sensor Science Division
, 100 Bureau Dr., MS 8364, Gaithersburg, Madrid 20899-8364a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. A 30, 061601 (2012)
Article history
Received:
April 18 2012
Accepted:
August 20 2012
Citation
James A. Fedchak, Dana R. Defibaugh; Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges. J. Vac. Sci. Technol. A 1 November 2012; 30 (6): 061601. https://doi.org/10.1116/1.4750482
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