Successful self-adjusted charge compensation was demonstrated for a CAMECA magnetic-sector secondary ion mass spectrometer applied in negative mode. Operation with the normal-incidence electron gun (NEG) potential positively biased relative to a sample potential enables substantial broadening of the Cs primary-ion-current density range available for analysis of insulators. The decrease of the negative NEG potential by 30 V allows the highest value of primary current density used for the analysis of a silica sample to increase by a factor of more than 6. By applying the improved charge neutralization technique, accurate Na depth profiles for SiO2 samples were obtained within detection limits of ∼3 × 1015 atoms/cm3.

Topics
Display devices, Electrical properties and parameters, Electrostatics, Mass spectrometry, Secondary ion mass spectrometry, Charge compensation, Depth profiling techniques, Electron beams, Ion source
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© 2012 American Vacuum Society.
2012
American Vacuum Society
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