Summary Abstract: Modification of metals by low energy ions during thin film deposition

Article navigation

Dissertation| November 01 1985

J. M. E. Harper;

J. M. E. Harper

IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

Search for other works by this author on:

PubMed

J. J. Cuomo

IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

Search for other works by this author on:

PubMed

J. Vac. Sci. Technol. A 3, 2693 (1985)

https://doi.org/10.1116/1.572817

You do not currently have access to this content.

Don't already have an account? Register

You could not be signed in. Please check your credentials and make sure you have an active account and try again.

Sign in