This report is part of the investigation on thin film temperature sensors for turbine blade applications. The effect of pretreatments on the morphology and properties of aluminum oxide thermally grown from NiCoCrAlY was investigated. The goal was to optimize process steps to produce a highly adherent, continuous, and insulating aluminum oxide. Two pretreatments were carried out, one in vacuum (∼10−4 Torr) at 1350 K for 5 h, and the other consisting of deposition of a 1 μm thick Al2O3 film by ARE (activated reactive evaporation). Samples were subsequently oxidized thermally at 1000 °C for 50 h at 0.5 Torr oxygen pressure. The two pretreatments were carried out on electron‐beam evaporation NiCoCrAlY, ∼120 μm thick, deposited on a superalloy turbine blade substrate. The results showed that the thermally grown oxide was significantly different in microstructure, surface topography and in its adherence to the NiCoCrAlY for the two pretreatments. Optimum results were obtained by combining the two pretreatments to produce an adherent, continuous, and insulating oxide film on the NiCoCrAlY coated superalloy substrate.
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November 1985
Research Article|
November 01 1985
Pretreatment effects on the morphology and properties of aluminum oxide thermally grown on NiCoCrAlY
S. Prakash;
S. Prakash
Department of Materials Science and Engineering, School of Engineering and Applied Science, University of California, Los Angeles, California 90024
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R. C. Budhani;
R. C. Budhani
Department of Materials Science and Engineering, School of Engineering and Applied Science, University of California, Los Angeles, California 90024
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H. J. Doerr;
H. J. Doerr
Department of Materials Science and Engineering, School of Engineering and Applied Science, University of California, Los Angeles, California 90024
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C. V. Deshpandey;
C. V. Deshpandey
Department of Materials Science and Engineering, School of Engineering and Applied Science, University of California, Los Angeles, California 90024
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R. F. Bunshah
R. F. Bunshah
Department of Materials Science and Engineering, School of Engineering and Applied Science, University of California, Los Angeles, California 90024
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J. Vac. Sci. Technol. A 3, 2551–2556 (1985)
Article history
Received:
April 18 1985
Accepted:
May 22 1985
Citation
S. Prakash, R. C. Budhani, H. J. Doerr, C. V. Deshpandey, R. F. Bunshah; Pretreatment effects on the morphology and properties of aluminum oxide thermally grown on NiCoCrAlY. J. Vac. Sci. Technol. A 1 November 1985; 3 (6): 2551–2556. https://doi.org/10.1116/1.572832
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